Defense Advanced Research Projects Agency (DARPA), Contracts Management Office (CMO), 3701 N. Fairfax Dr., Arlington, VA 22203-1714

A -- VIRTUAL INTEGRATED PROTOTYPING (VIP) OF VAPOR DEPOSITION PROCESSES- PHASE III SOL BAA97-36 DUE 103197 POC Dr. Anna Tsao, DARPA/DSO, fax (703) 696-3999 VIRTUAL INTEGRATED PROTOTYPING (VIP) OF VAPOR DEPOSITION PROCESSES, PHASE III SOL BAA 97-36. POC: Dr. Anna Tsao, DARPA/DSO, fax: (703) 696-3999, PROPOSALS ACCEPTED THROUGH 103197. The Defense Advanced Research Projects Agency (DARPA) is soliciting proposals for the development and demonstration of Phase III of the Virtual Integrated Prototyping (VIP) program which is focused on vapor deposition processes for functional materials. 3Virtual Integrated Prototyping,2 as applied to vapor deposition, is a methodology for developing an optimum manufacturing process, using computational simulation that integrates process physics and chemistry and effectively captures the science of vapor deposited film growth, as well as enabling innovative design and optimization of reactors with sufficient actuation, sensing, and advanced control to maintain process variables and product qualities within the performance range required for economically successful production. The specific goals of this DARPA VIP initiative areto: 1) develop and demonstrate physical models and fast, accurate simulators of vapor deposition processes; 2) develop model reduction methods for deriving simplified yet physically realistic models suitable for use in the development of on-line sensing, process control, and reactor design optimization; 3) demonstrate and validate models and reduction methods through the design, construction and process demonstration of an optimized reactor incorporating effective in-situ sensing and process control systems in a context relevant to cost-effective manufacturing; and 4) commercialize the models and computational tools developed to achieve broad impact on vapor phase materials manufacturing and design. Phase I of the VIP program (NSF BAA 96-75 at URL: http://dso.sysplan.com/DSO/BAA/past/nsf9675.htm) focused on the development of science-based process models and simulators. Phase II (DARPA BAA 97-02 at URL: http://dso.sysplan.com/DSO/BAA/current/9702.htm) expanded the Phase I model development effort with industrial applications, validations and transitions to industrial practice. This BAA, Phase III of the VIP program, seeks to leverage Phase I and II developments and achieve a comprehensive demonstration of the VIP methodology including all four of the above goals. Since a multidisciplinary combination of theoretical, experimental, computational and industrial expertise in mathematical and materials sciences, research, and engineering is needed to accomplish these goals, an interactive web site forum has been established to facilitate communications, networking and formation of effective multidisciplinary teams to respond to this solicitation. Links to information on VIP program participants resulting from Phases I and II will be available on this web site. This web site can be accessed at URL: http://www.sainc.com/vip/. In addition, a bulletin board of frequently asked questions (FAQ) is available at URL: http://www.sainc.com/arpa/acm/. BACKGROUND AND TECHNICAL ISSUES: Many innovative component and device concepts that offer significant performance advantages to DoD systems are based on the functional properties of vapor deposited materials. Examples include high temperature superconducting films, giant magneto-resistive structures, thermal management diamond, ferroelectrics, ferrites, photovoltaics, thermoelectrics, layered semiconductors, and many other electronic and microelectro-mechanical devices and structures. Although feasible device performance can often be demonstrated in the laboratory, cost effective manufacturing and optimal performance are frequently elusive due to the lack of understanding of the cause and effect relationship between the deposition process and device properties which makes process control and scale-up problematic. Furthermore, even when vapor deposited materials can be successfully produced for commercial applications, the aggressive operating environments encountered by the military often require significant modifications. Therefore, functional vapor deposited devices and components frequently require customization to meet the unique DoD conditions and stringent reliability demands of many DoD operations. Production of typical small lot DoD quantities on high volume manufacturing equipment is not economically feasible without model-based control and on-line sensing of critical process and product variables. This initiative seeks to develop and demonstrate the hierarchical, model-based design and control of vapor deposition reactors that includes in-situ sensing of critical process and product variables and provides the flexibility required to produce an array of quality products. The process models that constitute the basis of the design tools must be grounded in fundamental principles that effectively capture the science of film growth and predict the structure-property relationships of the resulting films. Development of new vapor deposited materials and processes is most effectively achieved with the concurrent development of mathematical process, sensing, and control models which incorporate methods of fast, accurate computation, actively coupled with experimental investigations and applications. This approach is most effective when applied to emerging functional materials rather than to economically entrenched manufacturing processes of established materials systems. The following four topic summaries highlight the major technical challenges of the VIP initiative. (1) Process Modeling and Simulation: Develop effective mathematical modeling and simulation techniques based on fundamental physicochemical principles for vapor deposition processes. (2) Model Reduction, Sensing, and Control Methods: In addition to process simulators, the VIP program seeks solution techniques for use in indirect sensing, sensor fusion and model-based process control. (3) Physical Demonstrations and Validations: Proposals must include demonstrations and validations of the models and reduction methods through design, development, construction and demonstration of optimized vapor deposition reactors incorporating on-line sensing of critical parameters and advanced control technology to effect a high quality and high yield manufacturing process. (4) Technology Transition, Commercialization and Industrial Demonstration: Proposals must include software commercialization that will achieve an industry-wide impact of the computational tools, techniques and methods for model creation, simulator development, indirect sensing, sensor fusion, control strategies and reactor optimization. Proposers should acquire the full topic descriptions in the Proposer Information Pamphlet (PIP) BAA 97-36, VIP Phase III. Proposals must address all of these topics in contexts that are consistent with the goals of the initiative. These topics are not meant to limit the scope of the investigations to be proposed. GENERAL COMMENTS: It is expected that the research proposals submitted will present an integrated and coherent program. Proposals will be evaluated in part on the likelihood of impact on real defense industrial problems. Synergy anticipated as a result of other research support or interactions is encouraged and should be described. Programs that leverage existing activities participating as a result of the Phase I and Phase II competitions are also encouraged when technically advantageous to reduce costs. Cost-sharing is strongly encouraged. Vapor deposition processes selected for detailed study and demonstration should be chosen based on DoD relevance and projected relative impact that virtual integrated prototyping will have on reactor design, process development and production of DoD materials or devices. PROPOSAL PROCESS: To assist the process of team formation and to provide an early assessment of proposal viability, this solicitation incorporates a three-stage process: (1) An interactive web site has been established at URL: http://www.sainc.com/vip/ to enable individual researchers and organizations with specific, applicable expertise or capabilities to provide a one- to two-page (non-proprietary) description of their capabilities and interests. This web site will remain active from the date of issuance of this BAA until final proposals are due. Specific information content, communications, networking and team formation are the sole responsibilities of the participants. DARPA will not participate in these activities other than to provide the web site forum to enable others to initiate communications. (2) Teams and consortia are encouraged to submit brief abstracts in advance of full proposals. DARPA will evaluate these abstracts and respond to the proposer within approximately seven (7) working days. Respondents with the most promising proposal abstracts will be encouraged to submit full proposals for evaluation. Regardless of the recommendation, the decision to propose is the responsibility of the proposer. The request for proposal abstracts is intended to save bidders the time and expense of preparing detailed proposals that have little chance of award. It is impractical for DARPA to provide a debrief of the proposal abstract. Proposers should obtain the Proposer Information Pamphlet (PIP) BAA 97-36, VIP Phase III. This document provides details of the proposal abstract format (margins -- 1-inch minimum, font -- 12 point minimum, and a page limit of 5 pages, single sided, on 8-1/2 x 11 inch paper). An original and five copies of the proposal abstract must be submitted to the administrative address for this BAA by 4:00 PM (ET) Friday, August 15, 1997, in order to be evaluated. Proposal abstracts ONLY (not proposals) may alternatively be submitted via electronic mail to BAA97-36@darpa.mil. E-mail submissions must be formatted as plain ASCII, 72 characters to the line, 60 lines to the page. This is the only format that will be accepted. No formal transmittal letter is required. DARPA will acknowledge receipt of submissions and assign control numbers that should be used in all further correspondence regarding abstracts and proposals. (3) Teams and consortia must submit full proposals for consideration in the final competitive selection. Proposers should obtain the Proposer Information Pamphlet (PIP) BAA 97-36, VIP Phase III. This document provides details of the proposal format (margins -- 1 inch minimum, font -- 12 point minimum, and page limits (42 pages, single sided, for the Technical Volume of the proposal; unlimited pages for the Cost Volume of the proposal), on 8-1/2 by 11 inch paper.) Due to the tight scheduling of this program, early submissions of proposal abstracts and/or full proposals is strongly encouraged. Selections for awards may be made at any time during the evaluation process. DARPA has identified total available funding of approximately $10M over three years beginning in FY98. Since this effort is intended to result in the development and demonstration of processing technology in manufacturing facilities, DARPA anticipates substantial industrial cost sharing and program funding via contract or agreements authority as applicable. Cost sharing and collaboration with other existing research activities that complement the proposed research are encouraged. This Commerce Business Daily notice, in conjunction with the BAA 97-36 Proposer Information Pamphlet (PIP), constitutes the total BAA. No additional information is available, nor will a formal RFP or other solicitation regarding this announcement be issued. Requests for the same will be disregarded. All responsible sources capable of satisfying the Government1s needs may submit a proposal which shall be considered by DARPA. The Government reserves the right to select for award all, some, or none of the proposals received in response to this announcement. Historically Black Colleges and Universities (HBCU) and Minority Institutions (MI) are encouraged to submit proposals and join others in submitting proposals. However, no portion of this BAA will be set aside for HBCU and MI participation. Award decisions will be based upon the following six evaluation criteria listed in descending order of relative importance: (1) scientific and technical merits of the proposed effort, including the goals and the feasibility of the approach; (2) the level and quality of mathematical innovation; (3) the potential impact on DoD1s functional materials needs; (4) qualifications of the principal investigator and other key research personnel, their record of past performance, and the adequacy of current and planned personnel, equipment, and facilities to accomplish the research objectives; (5) the feasibility of the plan for transitioning results to relevant DoD activities; (6) cost factors, including cost realism and extent and quality of cost share (if any). Proposals found deficient under criteria (1) or (2) will be deemed non-selectable and not evaluated further. The Government reserves the right to select for award all, some, or none of the proposals received. If warranted, portions of resulting awards may be segregated into pre-priced options. An original and five (5) copies of the full proposal and one 3.5 inch magnetic floppy storage disk of either Macintosh or IBM compatible media with all text in generic ASCII or Microsoft Word format must be delivered to the administrative address for this BAA on or before 4:00 PM (ET), Friday, October 31, 1997, in order to be considered. DARPA intends to use electronic mail and fax for some of the correspondence regarding BAA 97-36. Proposal abstracts and proposals may not be submitted by fax: any so sent will be disregarded. ADMINISTRATIVE ADDRESS FOR THIS BAA: Restrictive notices notwithstanding, proposals may be handled, for administrative purposes only, by Strategic Analysis Incorporated, a support contractor. This contractor is prohibited from competition in DARPA technical research and is bound by appropriate non-disclosure requirements. All proposals will be reviewed by government officials only. Input on technical aspects of the proposals may be solicited by DARPA from non-Government consultants who are bound by appropriate non-disclosure requirements. Non-Government technical consultants will not have access to proposals that are labeled by the offerors as 3Government Only.2 All administrative correspondence and questions on this solicitation should be directed by email, fax or mail to the administrative point of contact listed below. Telephone inquiries are strongly discouraged as DARPA intends to use electronic mail and fax for correspondence regarding this BAA. Written requests for the Proposer Information Pamphlet (PIP), general administrative information and proposal submission should be addressed to: DARPA/DSO, ATTN: BAA 97-36, 3701 N. Fairfax Drive, Arlington, VA 22203-1714; Faxed requests: 703-696-3999 Attn: DARPA/DSO, BAA 97-36; Email requests: baa97-36@darpa.mil. Administrative Point of Contact: Jennifer McDonald. (0191)

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