NASA Ames Research Center, Acquisitions Division, Mail Stop 241-1, Moffett Field 94035-1000

66 -- ION BEAM THIN-FILM DEPOSITION SYSTEM SOL RFQ2-36384(SLS) DUE 070896 POC Contact Point: SHARON L. SINNOTT, (415)604-6927, Fax: (415)604-0177 This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice -- This announcement constitutes the only solicitation, offers are being requested and a written solicitation will not be issued. This solicitation and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 90-38. This procurement is being conducted under the Simplified Acquisition Threshold (SAT) portion of the Federal Acquisition Streamlining Act (FASA). This notice is being issued as a Request for Quotation (RFQ) for an ion beam thin- film deposition system for producing amorphous and nano crystalline ultra-thin films of various elements (C,Cr etc.) by cold cathode ion beam sputter deposition. The ion source shall be capable of at least 15 mA/cm2 beam flux over a 70 mm2 target area for uniform specimen coverage. One electrostatic electron confinement ion source shall be provided, with an option to install a second source. The instrument shall be capable of depositing, repeatably and controllaby, untra-thin films from 3 to hundreds of Angstroms thickness for use in high resolution electron microscopy. The vacuum system shall be able to attain a pressure of 2 X 10-7 torr. The system shall have a turbomolecular drag pump, and a LN2 cryotrap shall be provided to maintain a clean vacuum within one inch of the sample. The cryotrap shall be automatically cooled and warmed during routine operation to preclude inadvertent water condensation during venting. The instrument shall accept individual samples as large as 4 inches in diameter, or up to 7 samples of 1 inch diameter. The sample stage shall independently allow tilting ranges from 0 degrees to plus or minus 99 degrees and variable rotation speeds such that during thin-film deposition, all exposed surfaces of the sample are coated. A quartz crystal film thickness monitor shall be integral to the instrument such that coatings are monitored during deposition. Thin film deposition shall be automatically terminated by preset thickness or preset time using the film thickness monitor. Four one-inch diameter targets shall be selectable in a carousel such that targets can be changed without breaking the vacuum or changing the deposition conditions inside the instrument. The vacuum, electrical and cryo systems shall be interlocked such that water or power failure will not damage the instrument. On- site training and installation shall be included. Item to be delivered shall be shipped FOB destination to: NASA-Ames Research Center, Receiving Section, Building 255, Moffett Field, CA 94035-1000. Delivery shall be no later than 60 days after contract award. The following FAR provisions apply to this solicitation: 52.212-1, Instruction to Offerors- Commercial, 52.212-2, Evaluation- Commercial Items. Offerors are reminded to include a completed copy of the provision at 52.212-3, Offeror Representations and Certifications- Commercial Items with their offer. 52.212-4, Contract Terms and Conditions-Commercial Items, 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items. Under FAR 52.212-5, the following clauses apply to this solicitation and any resultant contract: 52.222-3, 52.233-3, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.225-3, and 52.225-21. The referenced FAR clauses are available on the Internet. The World-Wide Web (WWW) address, or URL, of ARC Procurement home page is: http://Procure.arc. nasa.gov/Acq/Acq.html. This solicitation is rated DO-C9 under Defense Priorities and Allocations System. All offerors shall state in their offer their size status for this procurement. The SIC Code and size standard for this procurement are 3821 and 500 employees, respectively. All responsible sources shall submit written responses which shall include (1) Solicitation Number, RFQ2-36384(SLS), (2) price, (3) discount/ payment terms, (4) a description with sufficient technical detail to show that the product offered meets the requirements from the Government with descriptive literature. Questions regarding this acquisition must be submitted in writing no later than June 21, 1996. Quotations are due by 4:30pm PDT on July 8, 1996 to the attention of Sharon L. Sinnott and mail to NASA-Ames Research Center, M/S: 241-1, Moffett Field, CA 94035. It is contemplated that a firm-fixed price contract will be awarded. Award shall be made to the responsible offeror providing the most advantageous offer to the Government, price and other factors considered. The following factors shall be used to evaluate offers: (1) technical capability of the item offered to meet the Government requirement included in this solicitation, (2) price, (3) past performance. It is anticipated that an award will be made within 10 business days after the date of receipt of quotations. All responsible sources may submit a quote which will be considered by the Agency. A ombudsman has been appointed to hear concerns from offerors, potential offerors, and contractors during the preaward and postaward phases of this acquisition. The purpose of the ombuds man is not to diminish the authority of the contracting officer, or the selection official, but to communicate concerns, issues, disagreements and recommendations of interested parties to the appropriate Government personnel and to work to resolve them. When requested, the ombudsman will maintain strict confiden tiality as to the source of the concern. The ombudsman does not participate in the evaluation of proposals, or the adjudication of formal contract disputes. Interested parties are invited to call the installation ombudsman, Jana M. Coleman at (415)604-5963. Concerns, issues, disagreements, and recommendations which cannot be resolved at the installa tion may be referred to the NASA ombudsman, Tom Luedtke at (202)358-2090. DO NOT CALL THE OMBUDSMAN FOR SOLICITATION REQUEST OR INFORMATION. Before consulting with any ombuds man, interested parties must try to resolve their concerns with the contracting officer. The synopsis for this procurement acts as a formal RFQ. The expected issue date for solicitation RFQ2-36384(SLS) is 6/6/96. The expected return date for a quote is 7/8/96. All responsible sources may submit a quote which will be considered by the Agency. The synopsis for this procurement acts as a formal RFQ. NASA- Ames Research Center has an active Home Page. It is available at the following URL:http://Procure.arc.nasa.gov/Acq/Acq.html via a worldwide web browser such as Mosaic, Netscape, or similar application. The Home Page contains our synopses, subsequent solicitations, information on the NASA acquisitions and related helpful information. (0159)

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