SOURCES SOUGHT
66 -- SOURCES SOUGHT: Microscope-based Thin Film Measurement System
- Notice Date
- 7/22/2014
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B130, Gaithersburg, Maryland, 20899-1410, United States
- ZIP Code
- 20899-1410
- Solicitation Number
- AMD-14-SS46
- Archive Date
- 8/20/2014
- Point of Contact
- Paula Wilkison, Phone: 301-975-8448, Patrick Staines, Phone: (301)975-6335
- E-Mail Address
-
paula.wilkison@nist.gov, patrick.staines@nist.gov
(paula.wilkison@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- General Information Document Type: Sources Sought Notice Notice Number: AMD-14-SS46 Title: Microscope-based Thin Film Measurement System Classification Code: 66-Instruments and Laboratory Equipment NAICS Code: 334516 Contracting Office Address National Institute of Standards and Technology (NIST) Acquisition Management Division 100 Bureau Drive, Mail Stop 1640 Gaithersburg, MD, 20899-1640 The National Institute of Standards and Technology (NIST) seeks information on commercial vendors that are capable of providing a Microscope-based Thin Film Measurement System to support nanofabrication research and development in the Center for Nanoscale Science and Technology (CNST) user facility. The system will be sited in a class 100 cleanroom and used as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies, ranging from nanolithography novices to experts in the field. A common metrology requirement during microfabrication is the ability to measure the properties (thickness, optical constants, etc) of thin films in spatially defined regions with a small spot size (10 µm to 250 µm). Optical reflectometry is capable of measuring these properties, and this type of instrument can be integrated in to a microscope to allow the measurements to be made in a microspot on the sample surface. To make measurements of very thin films (less than 20 nm thick), ultra-violet (UV) wavelengths must be used, which requires a microscope specially designed for UV. NIST currently owns a Filmetric F20 UV reflectometer system for large (1.5mm) spot thin film measurements. This instrument is an essential thin film metrology tool for the users of the nanofab, and a microscope based thin film measurement system is needed to enable the same users to make identical measurements in small regions on samples with spot sizes between 10 µm and 50 µm. The required microscope based system must be interoperable with the presently owned and in-service F20 system (user training, software, and hardware). After results of this market research are obtained and analyzed and specifications developed for the microscope based thin film measurement system, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. The microscope based thin film measurement system meets the following requirements: 1. INTEROPERABILITY a. System should be fully controlled using Filmetrics FILMeasure software to enable all current F20 users to operate system without any additional training b. Software must include the materials database substantially identical to that of the presently owned and in-service F20 c. System material database files shall be shared with presently owned and in-service F20 system without any additional formatting or file conversion d. System Spectrometer hardware should be similar to that of F20 for maintenance and part replacement 2. FILM MEASUREMENT AND SPOT SIZE a. Measure film thickness down to 4nm or less within a spot size of 35 µm or less b. Measure film thicknesses between 20 nm and 2 µm within a 10 µm diameter spot c. Measure film thicknesses between 20 nm and 50 µm within a 100 µm diameter spot d. Measure film optical constants (n & k) on films thicker than 50 nm within a 35 µm diameter spot e. Measure film optical constants (n & k) on films thicker than 100 nm within a 10 µm diameter spot f. Integrated video camera to allow observation of the sample position 3. UV MICROSCOPE a. Manually controlled 3-axis micrometer for x and y position as well as focus b. Manually controlled four position objective turret c. Equipped with 3 objectives: 15× for UV illumination, and 5× and 50× for visible illumination 4. SOFTWARE a. Software must allow full control of all of the instruments features, including but not limited to: i. Live video image of the sample with visual indication of the region to be measured ii. All necessary calibration routines for normal operation (e.g. light and dark reference) b. Software must allow analysis of collected data, including but not limited to: i. Building of film stacks, constructed from materials in the software materials database ii. Fitting of collected data to film stacks to enable measurement of thickness and optical constants for each individual film layer iii. Saving and exporting of collected data, including images with the analysis region graphically defined NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification in any response to this notice. Companies that manufacture such microscope based thin film measurement system are requested to email a detailed report describing their abilities to paula.wilkison@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(s) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to paula.wilkison@nist.gov is currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Provide experience in the design and construction of microscope based thin film measurement systems. 6. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Point of Contact Paula Wilkison, Contract Specialist, Phone (301) 975-8448, email paula.wilkison@nist.gov
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/AMD-14-SS46/listing.html)
- Place of Performance
- Address: TBD, United States
- Record
- SN03433597-W 20140724/140722235354-309117e32b1ff2d45b4c69999d92d03c (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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