SOURCES SOUGHT
66 -- Single Wafer Spray Cleaning Tools
- Notice Date
- 2/12/2014
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B130, Gaithersburg, Maryland, 20899-1410, United States
- ZIP Code
- 20899-1410
- Solicitation Number
- AMD-14-SS17
- Archive Date
- 3/14/2014
- Point of Contact
- Harry L. Brubaker, Phone: 3019758330, Patrick K Staines, Phone: (301)975-6335
- E-Mail Address
-
Harry.Brubaker@nist.gov, patrick.staines@nist.gov
(Harry.Brubaker@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- The National Institute of Standards and Technology (NIST) seeks information on commercial vendors that are capable of providing two or more single wafer spray cleaning tools to support nanofabrication in the Center for Nanoscale Science and Technology (CNST), NIST's nanotechnology user facility. The tools will be sited and used as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies in the CNST NanoFab. After results of this market research are obtained and analyzed and specifications are developed for the tools that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. A single wafer spray cleaning tool is a stand-alone tool that is capable of cleaning wafers of various sizes using standard chemical cleaning recipes. These standard chemical cleaning recipes require mixtures of multiple chemical solutions. Wafer cleaning is the most frequently used step in nanofabrication processes. At NIST, wafer cleaning is currently done manually using immersion baths which creates cross contamination problems. In addition, researchers are required to wear full personnel protection equipment (PPE) due to the potential risk of exposure to the chemicals. A single wafer spray cleaning tool automatically executes pre-programmed cleaning processes without exposing researchers to the chemicals. NIST currently does not own any of this type of wafer spray cleaning tool, therefore you are invited to submit your capability statements for such equipment which meets the following minimum requirements. 1. GENERAL The single wafer spray cleaning tools are intended to be used by researchers to clean wafers using standard wafer cleaning recipes to eliminate immersion clean processes thus reducing wafer cross contamination and user interface with chemicals. The tools shall be suitable for installation and used in a vertical laminar flow, class 100 cleanroom. 2. Tool configuration a. Each system shall be a stand-alone single wafer spray cleaning tool and include the following components: (1) A process chamber with substrate holder; (2) A process controller and associated process control hardware and software; (3) A chemical cabinet for processing different chemical solutions (4) Spray process with front side, backside and chamber rinse. b. Each system shall be able to clean wafers/masks automatically. c. Each system shell shall be made of fire retardant polypropylene. d. Each system shall be facilitated with pneumatics and electronics controls within the footprint. e. Each system shall be facilitated with the chemical delivery system within the footprint. 3. Wafer compatibility and wafer loading a. The tool shall be able to process wafers with various sizes including 75 mm, 100 mm, 150 mm, 200 mm round wafers, and broken wafer pieces with irregular shapes. b. The tool shall also be able to process 125 mm and 150 mm square photomasks. c. The tool shall be able to process silicon, GaAs, GaN, SiC, quartz and glass wafers. 4. Chemical compatibility and delivery a. One of the tools shall be capable of executing RCA cleaning using the following chemicals: i. Mixtures of Ammonium hydroxide (NH4OH) and hydrogen peroxide (H2O2). ii. Mixtures of hydrochloric (HCl) acid and H2O2. iii. Dilute hydrofluoric (HF) acid, b. One of the tools shall be capable of executing Piranha cleaning using following chemicals: i. Mixtures of sulfuric (H2SO4) acid and H2O2. c. The tools shall be able to mix and deliver the chemical solutions to the process chamber as specified in a process recipe under microprocessor control. d. The temperature of the solutions shall be programmable and the tools shall have the capability to heat the chemical solutions up to a minimum of 85 °C. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification and socio-economic status in any response to this notice. Companies that manufacture single wafer spray cleaning tools are requested to email a detailed report describing their abilities to HARRY.BRUBAKER@NIST.GOV no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(s) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to HARRY.BRUBAKER @NIST.GOV is currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/AMD-14-SS17/listing.html)
- Place of Performance
- Address: 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640, United States
- Zip Code: 20899-1640
- Zip Code: 20899-1640
- Record
- SN03287005-W 20140214/140212234109-3ce1d0edad4186ea842b9ab3183921cb (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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