PRESOL | B | Multilayer Coating of X-ray gratings for a prototype microCT Scanner

FBO DAILY ISSUE OF NOVEMBER 17, 2011 FBO #3645
SOLICITATION NOTICE

B -- Multilayer Coating of X-ray gratings for a prototype microCT Scanner

Notice Date: 11/15/2011
Notice Type: Presolicitation
NAICS: 541712 — Research and Development in the Physical, Engineering, and Life Sciences (except Biotechnology)
Contracting Office: Department of Health and Human Services, National Institutes of Health, National Heart, Lung and Blood Institute, Rockledge Dr. Bethesda, MD, Office of Acquisitions, 6701 Rockledge Dr RKL2/6100 MSC 7902, Bethesda, Maryland, 20892-7902
ZIP Code: 20892-7902
Solicitation Number: NHLBI-CSB-(HL)-2012-023--DDC
Archive Date: 12/14/2011
Point of Contact: Deborah - Coulter, Phone: (301) 435-0368
E-Mail Address: dc143b@nih.gov
(dc143b@nih.gov)
Small Business Set-Aside: N/A
Description: THIS IS A NOTICE OF INTENT, NOT A REQUEST FOR A PROPOSAL. A SOLICITATION DOCUMENT WILL NOT BE ISSUED AND PROPOSALS WILL NOT BE REQUESTED. The COAC Services Branch, Office of Acquisitions, DERA, National Heart, Lung, and Blood Institute (NHLBI), NIH, for the Laboratory of Cardiac Energetics (LCE), intends to negotiate and award a purchase order on a noncompetitive sole source basis to Pennsylvania State University, 103 Shields Building, University Park, PA, 16802, to provide the following services, as outlined below. The reference number: NHLBI-CSB-(HL)-2012-023-DDC. Background Information The Imaging Physics Lab of the Biophysics and Biochemistry Branch, National Heart, Lung and Blood Institute, National Institutes of Health (NHLBI) has developed the design of a multilayer-coated micro grating array (MLMGA) for hard x-ray phase-contrast radiography and computed-tomography (CT). Phase-contrast CT holds the promise to dramatically improve the visibility of soft tissue structures and reduce radiation exposure to patients when compared to conventional absorption contrast CT. The essential component of phase-contrast CT is x-ray absorption and phase gratings. How small the grating periods are determines how sensitive the system is to minute phase shifts in tissue. Up-to-date, lithography fabrication techniques have not been able to achieve grating periods below 1 micrometer, due to the prohibitively high aspect ratio of the vertical structures. NHLBI developed a solution to overcome the grating period limitation. The solution is in the form of an array of micro gratings on a staircase substrate, where each step is coated with multiple bi-layers of a high and low atomic number material (e.g., tungsten and silicon). Each step acts as a micro grating. This design allows submicron to nanometer grating periods with unlimited aspect ratio, and large grating areas when continuity condition between the steps are met. There a several significant differences between the multilayer coating of MLMGA and those of conventional multilayer x-ray or conventional light optics. First, MLMGA requires uniform deposition on one surface (floor surface) of a staircase substrate and minimal deposition on the other surface (side wall); Secondly, the total thickness of the multilayer stack in MLMGA needs to be tens of micrometers as opposed to nanometers in conventional multilayer x-ray optics, or a few microns in light optics; Third, the individual layer thickness of MLMGA will be equal to or greater than 50 nanometers, which is orders of magnitude thicker than conventional multilayer x-ray optics; Lastly, the interface sharpness and smoothness in MLMGA is less crucial than in conventional multilayer x-ray optics. Because of the above specifications, a high rate and directional coating technology is required for multilayer deposition in MLMGA. Electron-beam physical vapor deposition (EB-PVD) is a technology that potentially meets the requirement. Purpose and Objectives for the Procurement The overall objective of this procurement is to obtain multilayer coatings of tungsten/silicon bi-layers and molybdenum/silicon bi-layers on patterned silicon wafer substrates. The coatings will meet specifications described below, which will be sufficient to be used as gratings of a prototype phase-contrast microCT scanner. The silicon substrates will be provided by Contracting Officer Technical Representative (COTR). The staircase pattern on the silicon substrates will have individual steps of approximately 28 micrometer height and 35 micrometer diagonal width. The precise dimensions of the substrate pattern will be provided to the Contractor by COTR. The final specifications on the multilayer coatings are 1. The multilayer coating consists of a stack of bi-layers of identical thickness. Each bi-layer consists of two material layers of equal thickness. The material combinations will be tungsten/silicon and molybdenum/silicon. 2. The total number of bi-layers will be close to or equal to 141, or a number mutually agreed upon by the Contractor and COTR based on results from coating trials performed by the Contractor. 3. The total thickness of the multilayer should match the step height of the staircase pattern to within 10% of the bi-layer thickness. Equivalently, the thickness of an individual bi-layer should be set to the height of an individual step of the staircase divided by the total number of bi-layers (N), and the error in the average thickness of the bi-layers should be within 0.1/N of this target bi-layer thickness. Randomly fluctuations of the bi-layer thickness should be within 0.5% of the target thickness. 4. Deposition on the side walls of the staircase pattern should be minimized. Deposition on the floor surfaces of the staircase pattern should cover most of their width. 5. Adhesion of the multilayer coating to the substrate should be sufficient to avoid any spontaneous delamination or detachment from the substrate. 6. The multilayer coating shall be uniform over an area of 3.0 cm by 3.0 cm, or an area that is mutually agreed upon between COTR and the Contractor based on results from coating trials performed by the Contractor, to provide for a sufficiently large field of view in the prototype microCT scanner. COTR will provide substrates that have patterned areas larger than 3 cm by 3 cm to facilitate meeting this specification. The contract will be fulfilled in three phases as outlined in the next section. Contractor Requirements The Contractor is required to have EB-PVD facility capable of deposition rates of 200 nm/min or higher, prior experience in multilayer coating of similar material combinations and dimensions as described in the final specifications in the "Purpose and Objectives for the Procurement" section, and expert knowledge of the stresses, layer thickness control and adhesion quality of multilayer coatings of similar material combinations and dimensions as described in the final specifications. Contractor will perform on a reasonable best effort basis each Phase of the contract with the aim of reaching each deliverable. During each Phase, it is anticipated that the Contractor will fabricate a number of trial coatings on substrates that are supplied by COTR, while making various technical adjustments and optimizations. The trial coatings will be evaluated by the Contractor and by COTR with light microscopy, scanning electron microscopy and any other inspection tools that may be necessary. The Contractor and COTR will communicate to the other party the evaluation results. Based on the evaluation results, the Contractor will discuss with COTR possible adjustments for successive trials. The Contractor shall not proceed to the next phase until the COTR has approved the submitted accepted deliverables. Phase I The objective of Phase I is to fabricate tungsten/silicon multilayer of the required total thickness and individual bi-layer thickness in a limited area on the patterned substrate. To accomplish Phase I, at a minimum, the Contractor shall deliver to COTR a tungsten/silicon multilayer-coated sample that meets all of the following specifications in a part of the patterned area: 1. The multilayer coating consists of a stack of bi-layers of identical thickness. Each bi-layer consists of a layer of tungsten and a layer of silicon. 2. The total number of bi-layers will be close to 141, or a number mutually agreed upon by the Contractor and COTR based on results from coating trials performed by the Contractor. 3. The total thickness of the multilayer should match the step height of the staircase pattern to within 10% of the bi-layer thickness. Equivalently, the thickness of an individual bi-layer should be set to the height of an individual step of the staircase divided by the total number of bi-layers (N), and the error in the average thickness of the bi-layers should be within 0.1/N of this target bi-layer thickness. Randomly fluctuations of the bi-layer thickness should be within 0.5% of the target thickness. 4. Deposition on the side walls of the staircase pattern should be minimized. Deposition on the floor surfaces of the staircase pattern should cover most of their width. 5. Adhesion of the multilayer coating to the substrate should be sufficient to avoid any spontaneous delamination or detachment from the substrate. Phase II The objective of Phase II is to fabricate tungsten/silicon multilayers that meet all specifications in the "Purpose and Objectives for the Procurement" section, including the dimensions of the layers and uniformity over a large area. To accomplish Phase II, at a minimum, the Contractor shall deliver to COTR three tungsten/silicon multilayer-coated samples that meet all of the following specifications: 1. The multilayer coating consists of a stack of bi-layers of identical thickness. Each bi-layer consists of a layer of tungsten and a layer of silicon. 2. The total number of bi-layers will be close to 141, or a number mutually agreed upon by the Contractor and COTR based on results from coating trials performed by the Contractor. 3. The total thickness of the multilayer should match the step height of the staircase pattern to within 10% of the bi-layer thickness. Equivalently, the thickness of an individual bi-layer should be set to the height of an individual step of the staircase divided by the total number of bi-layers (N), and the error in the average thickness of the bi-layers should be within 0.1/N of this target bi-layer thickness. Randomly fluctuations of the bi-layer thickness should be within 0.5% of the target thickness. 4. Deposition on the side walls of the staircase pattern should be minimized. Deposition on the floor surfaces of the staircase pattern should cover most of their width. 5. Adhesion of the multilayer coating to the substrate should be sufficient to avoid any spontaneous delamination or detachment from the substrate. 6. The multilayer coating shall be uniform over an area of 3.0 cm by 3.0 cm, or an area that is mutually agreed upon by COTR and the Contractor based on results from coating trials performed by the Contractor, to provide for a sufficiently large field of view in the prototype microCT scanner. COTR will provide substrates that have patterned areas larger than 3 cm by 3 cm to facilitate meeting this specification. Phase III The objective of Phase III is to fabricate molybdenum/silicon multilayer coatings on the same substrate as the tungsten/silicon multilayer coating. To accomplish Phase III, at a minimum, the Contractor shall deliver to COTR three tungsten/silicon multilayer-coated samples that meet all of the following specifications: 1. The multilayer coating consists of a stack of bi-layers of identical thickness. Each bi-layer consists of a layer of molybdenum and a layer of silicon. 2. The total number of bi-layers will be the same as the total number of bi-layers in the tungsten/silicon multilayers accomplished in Phase II. 3. The total thickness of the multilayer should match the step height of the staircase pattern to within 10% of the bi-layer thickness. Equivalently, the thickness of an individual bi-layer should be set to the height of an individual step of the staircase divided by the total number of bi-layers (N), and the error in the average thickness of the bi-layers should be within 0.1/N of this target bi-layer thickness. Randomly fluctuations of the bi-layer thickness should be within 0.5% of the target thickness. 4. Deposition on the side walls of the staircase pattern should be minimized. Deposition on the floor surfaces of the staircase pattern should cover most of their width. 5. Adhesion of the multilayer coating to the substrate should be sufficient to avoid any spontaneous delamination or detachment from the substrate. 6. The multilayer coating shall be uniform over an area of 3.0 cm by 3.0 cm, or an area that is mutually agreed upon by COTR and the Contractor based on results from coating trials performed by the Contractor, to provide for a sufficiently large field of view in the prototype microCT scanner. COTR will provide substrates that have patterned areas larger than 3 cm by 3 cm to facilitate meeting this specification. Contract Performance Period The Government anticipates award date of December 5th 2011. Period of performance of the contract is anticipated to be 6 months with an ending date of May 4th 2012. Government Responsibilities Provide the Contractor details of the desired multilayer architecture; Provide the Contractor the substrates for coating and all relevant information about the substrates; Communicate to the Contractor the results of sample inspections within a minimum of 5 business days after receiving the samples from the Contractor; Discuss with the contractor ways to optimize the multilayer coating process. Program Management and Control The Contractor shall have regular communication with COTR at least once a week by telephone, email or video conferencing for the purpose of keeping both sides up-to-date on the status of the coating trials and inspection results of coated samples. Note: If at 50% completion of any current Phase, the Contractor determines that the results of the current Phase cannot be achieved the Contractor shall notify the COTR immediately. Reporting, Deliverable Requirement and Payment The Contractor shall, on a reasonable best effort basis, perform each phase of the contract outlined above. COTR anticipates that the Contractor may need to perform multiple trial coating runs in each Phase of the contract before meeting the minimal requirement. The Contractor will deliver to COTR the coated samples of each batch of trials when they are available, and communicate with COTR the results of inspections they have done. The coated samples and a copy of invoices shall be delivered to the COTR: The delivery point is the National Institutes of Health (NIH), National Heart, Lung, and Blood Institute), 10 Center Drive, Building 10-Room B1D416, Bethesda, Maryland 20892. The sole source determination is based on the fact that the Biochemistry and Biophysics Center (BCBPC) mission is to develop non-invasive imaging technologies for the benefit of biomedical applications. A current focus of our program is phase-contrast x-ray imaging. This is a new class of x-ray imaging techniques that holds the promise of substantially enriching the information content in radiography and CT. As part of this effort the Government is looking for multilayer x-ray optics of the type that is detailed in the specifications. In March and May of 2011, preliminary coating trials were performed for COTR, by two other laboratories and Penn State. Of the three results Penn State was technically superior both in the multilayer structure and in the speed of the coating run. To further assess the feasibility of such coatings, COTR solicited for competitive bids to perform trial coatings. An award was issued to Penn State to perform 5 - 7 trial coatings. Therefore, it is in the Government's best interest to continue services with Penn States for the finish product, and not compete, the contract to avoid jeopardizing outcome of this research. The notice of intent is not a request for competitive proposals. Only one responsible source and no other supplies or services will satisfy agency requirements. Industry Classification (NAICS) Code is 541712, Research and Development in the Physical, engineering, and Life Sciences with size standard of 500 employees; the small business set-aside does not apply to this requirement. The acquisition is being conducted under FAR Part 13, simplified acquisition procedures, therefore the requirements of FAR Part 6 B Competitive Requirements are not applicable (FAR Part 6.001) and the resultant purchase order will include all applicable provisions and clauses in effect through the Federal Acquisition Circular (FAC) 05-54 (November 2, 2011). This notice of intent is not a request for competitive proposals. Interested parties may identify their interest and capabilities in response to this synopsis, by November 29, 2011, 7:30 am Eastern Standard Time. The determination by the Government not to compete the proposed contract based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct future competitive procurement. Inquires to this announcement, referencing synopsis number NHLBI-CSB-(HL)-2012-023-DDC, may be submitted to the National Heart, Lung and Blood Institute, Office of Acquisition, Procurement Branch, 6701 Rockledge Drive, Suite 6042, Bethesda, Maryland 20892-7902, Attention: Deborah Coulter. Response may be submitted electronically to coulterd@nhlbi.nih.gov. Faxes will not be accepted. Responses will only be accepted if dated and signed by an authorized company representative.
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Place of Performance: Address: NIH/NHLBI, Bethesda, Maryland, 20892, United States; Zip Code: 20892
Record: SN02623605-W 20111117/111115234442-7b74d68d681ef29e560d5fe0bf634ec7 (fbodaily.com)
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B -- Multilayer Coating of X-ray gratings for a prototype microCT Scanner