SOURCES SOUGHT
66 -- SPUTTER DEPOSITION SYSTEM
- Notice Date
- 9/7/2011
- Notice Type
- Sources Sought
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- NB684020-11-03605
- Archive Date
- 9/30/2011
- Point of Contact
- Janice M Moten, Phone: (301)975-6307, Chon S. Son, Phone: 301-975-8567
- E-Mail Address
-
Janice.Moten@nist.gov, chon.son@nist.gov
(Janice.Moten@nist.gov, chon.son@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is being issued using Simplified Acquisition Procedures. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-50. The associated North American Industrial Classification System (NAICS) code for this procurement is 334119 with a small business size standard of 500 employees. This requirement is unrestricted and all interested Contractors may submit a quotation. All interested Contractors shall provide a quote for the following: The following line items comprise a complete Programmable Robot Safety System: Line Item 0001: THREE GUN RF SPUTTER DEPOSITION SYSTEM This system shall comprise quantity three ultra-high vacuum (UHV) sputter guns suitable configured for magnetic materials, cable connections to a 300 W RF power supply, and switch connectivity to allow the power supply to power any one of the sputter guns and switch to another without manually moving cabling. System shall include all parts and components necessary for it to be fully operational once installed on a UHV vacuum chamber with the following user provided elements: targets, cooling water, sputter gas, compressed air and 115/230 VAC electricity. Each of the three sputter guns shall be: • UHV compatible and not incorporate any elastomers, i.e., capable of base pressures of <5 x 10-11 Torr with a bake-out temperature of 200 C. • Each sputter gun shall be mounted on a 6" conflat style flange and be able to easily fit through a standard 6" CF port. • The nominal flange-to-target face distance should be approximately 12". A 12" insertion length is not a rigid requirement, however, designs with fixed insertion lengths that cannot be adjusted per customer specification prior to production should clearly state what the available insertion lengths are that are close to 12". Greater value will be afforded solutions that have insertion depths that can be selected according to customer specification. • Sputter guns shall utilize targets at least 2" in size and the guns shall be capable of sputtering sputter nickel from 1/16" target (minimum thickness) in <0.5mTorr of Ar. Additional value consideration will be given to products whose high strength magnets (or magnetic materials conversion kits) can be removed to provide a well-balanced magnetic field for non-magnetic materials. • Sputter guns shall incorporate local gas injection to minimize the plasma ignition pressure and be able to operate at sputter gas pressures of <0.5 mTorr and incorporate a chimney or other gas confinement to localize the sputter gas pressure. • Each sputter gun shall be equipped with a "swing style" shutter that is electro-pneumatically actuated or otherwise automated for compatibility with computerized process control • Sputter guns that have the capability of tilting from the flange normal for tuning of deposition uniformity shall be afforded an increased value, bidder should clearly state range of tilting angles and MSRP value of tilting over fixed angle mounts. Further, solutions that provide for in situ adjustment of the tilt angle will be afforded greater value than those with a "manually" adjusted tilt mechanism. • Each sputter gun shall have water cooling that maintains the target sufficiently cool for normal operation • Sputter guns shall be capable of sputtering with a dilute concentration of background nitrogen or oxygen gas (<50% of the Ar sputter gas pressure, supplied separately from the sputter gas injection by user equipment ) suitable for deposition of CuN and MgO. • Additional value will also be afforded solutions that allow magnets to be reconfigured without breaking vacuum or removed during bake-out of the vacuum chamber. Power Supply, Tuning Network, Switching and Cabling • RF Power Supply shall be able to tunably and controllably deliver at least 300W of power into a 50 ohm load • Power supply shall operate on standard electrical service of 115/230 VAC • Power supply shall be capable of being mounted in a standard 19" rack mount • Power supply shall incorporate or be connected to an auto-tuning matching network for balancing the impedance of the circuit • The power supply shall further incorporate or be connected to a switching mechanism that allows the output of the auto-tuning circuit to be switched between the cable sets for each of the three sputter guns. Mechanisms that prevent switching of the output destination when the circuit is energized will be given value added consideration. • If auto-tuning and switching are not integrated into the power supply unit, then these elements shall also be capable of being mounted in a standard 19" rack • Complete cable sets from the output of the switching box to each of the sputter guns shall be included and of sufficient length to allow the sputter guns to be located at least 3 meters from the switch box. ***All quotes shall be received not later than 12:00 PM local time, on July 15, 2011, at the National Institute of Standards & Technology, Acquisition Management Division, 100 Bureau Drive, Building 301, Room B125, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attn: Janice Moten. Any questions or concerns regarding this solicitation should be forwarded in writing via e-mail to the Purchasing Agent (Janice Moten) Janice.moten@nist.gov. E-mailed quotes are acceptable. Faxed quotes will NOT be accepted. Offerors' quotations shall not be deemed received by the Government until the quotation is entered into the e-mail address inbox set forth above.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB684020-11-03605/listing.html)
- Place of Performance
- Address: 301/B112, 100 bureau drive m/s, gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02566141-W 20110909/110908000241-6aff4bb2e33aba64eee4223cf929e767 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |