SOLICITATION NOTICE
66 -- Atomic Force Microscope / Scanning Probe Microscopy System
- Notice Date
- 9/1/2011
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-11-RQ-0703
- Archive Date
- 9/27/2011
- Point of Contact
- Paula Wilkison, , Todd D Hill,
- E-Mail Address
-
paula.wilkison@nist.gov, todd.hill@nist.gov
(paula.wilkison@nist.gov, todd.hill@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A SEPARATE WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THE SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES UNDER THE AUTHORITY OF FAR 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-53, effective August 4, 2011. 1352.215-72 INQUIRIES (APR 2010) Offerors must submit all questions concerning this solicitation in writing to the Contracting Officer. Questions should be received no later than five calendar days after the issuance date of this solicitation. All responses to the questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, on the question responses included in the amendment to the solicitation will govern performance of the contract. (end of provision) The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This requirement is unrestricted and all interested Contractors may submit a quotation. All offerors shall provide a quotation for the following line item: Line Item 0001: One (1) Atomic Force Microscope / Scanning Probe Microscopy System Introduction The contractor shall furnish the necessary personnel, material, and equipment to fabricate, deliver, and install an Atomic Force Microscope / Scanning Probe Microscopy System. Background NIST has a requirement for a scanning probe microscope (SPM) system to examine various aspects of the Complementary Metal Oxide Semiconductor (CMOS) Front end of line (FEOL) and Back end of line (BEOL) processes. Back-end-of-line (BEOL) denotes the second portion of IC fabrication where the individual devices (transistors, capacitors, resistors, etc.) get interconnected with wiring on the wafer. BEOL generally begins when the first layer of metal is deposited on the wafer. It includes contacts, insulating layers (dielectrics), metal levels, and bonding sites for chip-to-package connections. After the FEOL processes there is a wafer with isolated transistors (without any wires). In the BEOL part of fabrication stage, contacts (pads), interconnect wires, vias and dielectric structures are formed. NIST requires a scanning probe microscope system with demonstrated capability to perform scanning microwave microscopy and other microwave frequency measurements useful for the characterization of the components of thte BEOL processes, that is, for characterization of contacts, through wafer vias, interconnect lines and dielectric layers. The essential functions of the required instrument include a demonstrated and documented scanning microwave microscopy (SMM) mode, a turn-key scanning Kelvin force microscopy mode, and an open architecture and design for microwave operation to permit development of new modes of scanning probe microscopy at microwave frequencies for sub-surface dielectric and compositional characterization of BEOL processes Minimum Requirements The AFM/SPM shall meet or exceed the technical specifications identified below. All items must be new. Prototypes, demonstration models, used or refurbished instruments will not be considered for award. 1) Turn key operation of atomic force microscopy in contact and tapping (non-contact) modes, at room pressures, including demonstration of X/Y and Z spatial resolution sufficient to observe atomic steps in epitaxially grown silicon and a continuously variable scan size to at least 90 x 90 micrometers. 2) Current sensing/ conductive AFM and scanning tunneling microscopy (STM) modes. 3) Turn key operation of single pass Kelvin force microscopy, that is, single scan, simultaneous, AFM and SKFM. 4) System shall provide turnkey operation of Scanning Microwave Microscopy (SMM) at variable frequency from 100 MHz to at least 6 GHz. (Here, SMM is defined as simultaneous AFM and measurement of transmitted and reflected microwave signal with a vector network analyzer (VNA).) Integrated software to control the VNA must be included. a. System shall provide ability to produce low noise images at room pressure of nanometer-size dopant gradients in silicon and sub-surface imaging of the buried metal lines in a typical BEOL process. b. System shall be capable of applying and processing microwave frequency radiation throughout its signal pass and have available nose cones/tip holders designed to prevent undesired radiation of microwave radiation while directing it to the terminal tip. c. System shall be capable of producing SMM images with a commercially available VNA with external control capability. d. Instrument shall be suitable for examining existing and emerging BEOL processes, such as, at a minimum, through wafer vias, buried metal line integrity, intermetal dielectric quality, level-to-level vias, including carbon nanotube bundles. e. Instrument must also be capable of a broad range of microwave frequency measurements. 5) System shall include an environmental/atmosphere control chamber where the relative humidity at the sample can be controlled down to near 0% by continuous purge of an inert gas, and various mixtures of low toxicity gasses can be controllably introduced. 6) System shall include an acoustic and mechanical vibration isolation system to enable low noise measurements at the specified spatial resolution on a normal laboratory bench. 7) System shall include a temperature controlled stage, with below room temperature electronic (i.e. non-liquid cryogen) cooling to -30 C and heating to at least 250 C. 8) System shall include an SPM controller with an open architecture to allow internal signals to be accessed, externally processed, and re-inserted into the control stream. This must include at least 4 accessible input and 4 output analog- to-digital channels, three accessible and controllable lock-in amplifiers, and a complete signal breakout box. 9) System shall include a complete software control and image analysis package, permitting acquisition, control, and display of externally applied signals. Installation The instrument shall be installed by the Contractor and meet contract specifications no later than two weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the instrument, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, Maryland. Acceptance Testing In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor's expense. Acceptance testing will consist of demonstration of all operation modes claimed in product literature and included in the delivered product in a near 0% humidity local environment. A dopant gradient, work function, and buried metal line test samples produced at NIST will be available for acceptance testing. Specifically, the following nine acceptance performance measures will be demonstrated: 1. Demonstration of a non-contact AFM image of 1 x 1 micrometer and 90 x 90 micrometer areas of a silicon dioxide on silicon surface with sub 1 nano-meter surface roughness in an inert, low-humidity atmosphere. 2. Demonstration of a current image and a local I-V curve measurement of a silicon dioxide on silicon surface using a conductive AFM or STM mode in an inert, low-humidity atmosphere. 3. Demonstration of a single pass Kelvin force image of a NIST provided test structure with Al, Cr and Au lines in an inert, low-humidity atmosphere. 4. Demonstration of SMM of a dopant gradient sample and using a vector Network Analyzer, both provided by NIST. 5. Load and measurement of a sample in the included environmental control chamber and demonstration of local humidity of 2% or less. 6. Demonstration of the included acoustic and vibration enclosures sufficient to produce AFM images of a sub-nanometer roughness surface in the laboratory where the instrument is installed. 7. Demonstration of temperature controlled stage. 8. Demonstration of the application of an external bias to the SPM tip through the breakout box and demonstration of access to the input and outputs of three internal lock-in amplifiers. Training The contractor shall conduct one (1) training session, of at least one day, for technical personnel at NIST. Training shall include: 1) use of included software; 2) demonstration of monitor of three external input channels with the included software; 3) a thorough demonstration of all system functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST immediately after installation/set-up, but shall be completed no later than two weeks after installation. Express Warranty Contractor shall provide a standard commercial warranty. Delivery FOB Destination delivery terms are requested, and shall take place in accordance with Contractor's commercial schedule. The contractor shall deliver line item 0001 to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-1640. PROVISIONS AND CLAUSES: The following provisions and clauses apply to this acquisition and are hereby incorporated by reference. All FAR clauses may be viewed at http://acquisition.gov/comp/far/index.html. Provisions 52.212-1, Instructions to Offerors-Commercial Items 52.212-3 Offeror Representations and Certifications-Commercial Items Offerors shall complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. Clauses 52.212-4 Contract Terms and Conditions-Commercial Items 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items-Commercial Items including subparagraphs: 52.203-6, Restrictions on Subcontractor Sales to the Government; 52.204-10, Reporting Executive Compensation; 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns; 52.219-8, Utilization of Small Business Concerns; 52.219-28, Post Award Small Business Program Re-representation; 52.222-3, Convict Labor; 52.222-19 Child Labor - Cooperation With Authorities And Remedies; 52.222-21, Prohibition of Segregated Facilities; 52-222-26, Equal Opportunity; 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans 52.222-36, Affirmative Action for Workers with Disabilities; 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; 52.222-40, Notification of Employee Rights under the National Labor Relations Act; 52.223-18, Contractor Policy to Ban Text Messaging While Driving; 52.225-3, Buy American Act - Free Trade Agreements - Israeli Trade Act (June 2009) 52.225-13 Restriction on Certain Foreign Purchases; 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration. INSTRUCTIONS: Central Contractor Registration In accordance with FAR 52.204-7, the awardee must be registered in the Central Contractor Registration (www.ccr.gov) prior to award. Refusal to register shall forfeit award. Due Date for Quotations Offerors shall submit their quotations so that NIST receives them not later than 12:00 p.m. Eastern Time on September 12, 2011. FAX quotations shall not be accepted. E-mail quotations shall be accepted at paula.wilkison@nist.gov. Please reference the RFQ number in the subject line of email communications. Offerors' quotations shall not be deemed received by the Government until the quotation is entered in the e-mail inbox set forth above. Quotations shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Paula Wilkison, 100 Bureau Drive, Mail Stop 1640, Gaithersburg, MD 20899-1640. All offerors should ensure the RFQ number is visible on the outermost packaging. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Paula Wilkison, Contract Specialist on 301-975-8448. Addendum to FAR 52.212-1, Quotation Preparation Instructions 1) Price Quotation: The offeror shall submit an original and one copy of the completed price schedule. If the quotation is submitted electronically, additional copies are not required. The pricing quotation shall be separate from any other portion of the quotation. The offeror shall propose a firm-fixed-price, FOB Destination, for each CLIN. Contractor shall state express warranty coverage. Price quotations shall remain valid for a period of 90 days from the date quotations are due. 2) Technical Quotation: The offeror shall submit an original and one copy of the technical quotation. If the quotation is submitted electronically, additional copies are not required. The technical quotation shall address the following: Technical Capability: The offeror shall submit a technical description or product literature for the equipment it is proposing, which clearly identifies the manufacturer, make and model. The offeror must demonstrate that its proposed equipment meets or exceeds each minimum requirement described in the statement of work by providing a citation to the relevant section of its technical description or product literature. NOTE: For specifications 4a, 4b, and 4c, documentation that the offer's equipment meets the stated specifications shall be provided by offeror in the quotation. Data published in journals or workshops is acceptable, as well as data provided directly by the manufacturer or their collaborators in application notes or private communications. If applicable, evidence that the Offeror is authorized by the original equipment manufacturer to provide the item(s) in the quotation should be included. The Offerors shall acknowledge that NIST will not store the equipment onsite before it is installed. 3) Past Performance: The offeror shall provide past performance information regarding relevant contracts over the past five (5) years with Federal, state, or local governments, or commercial customers. If the offeror has no relevant past performance, it may include a statement to that effect in its quotation. The government reserves the right to consider data obtained from sources other than those described by the offeror in its quotation. It is recommended that approximately 3-5 contracts be referenced. Acceptance of Terms and Conditions (Addendum to FAR 52.212-1 (b) (11)): This is an open-market solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this solicitation that will include the clauses set forth herein. The quotation should include one of the following statements: "The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition." OR "The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) Note: This procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the offeror's FSS or GWAC contract, and the statement required above shall be included in the quotation. QUOTATION EVALUATION: Evaluation Factors Award shall be made to the offeror whose quotation offers the best value to the Government price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability 2) Past Performance, and 3) Price. All non-price factors, when combined, are approximately equally important to price. Technical Capability: All items must be new. Prototypes, demonstration models, used or refurbished instruments will not be considered for award. Evaluation of technical capability shall be based on the information provided in the quotation. NIST will evaluate whether the offeror has demonstrated that its proposed equipment meets or exceeds all minimum requirements. Quotations that do not demonstrate the proposed equipment meets all requirements will not be considered further for award. If an offeror does not indicate whether its proposed equipment meets a certain minimum requirement, NIST will determine that it does not. NIST will give preference to offerors who demonstrate that their proposed equipment exceeds NIST's requirements. 1) Specification 4 - SMMs based on ac scanning tunneling microscopy are not acceptable. 2) Specification 5 - UHV systems are not acceptable. Past Performance: The Government will evaluate the Offeror's past performance information and, if appropriate, its proposed subcontractors' past performance to determine its relevance to the current requirement and the extent to which it demonstrates that the offeror has successfully completed relevant contracts in the past five years. In assessing the offeror's past performance information, NIST will evaluate the quality, timeliness, and ability to control cost and schedule of the past work. Evaluation of this factor will be based on information contained in the technical portion of the quotation and information provided by references. The Government will evaluate past performance information by contacting appropriate references, including NIST references, if applicable. The Government may also consider other available information in evaluating the Offeror's past performance. The Government will assign a neutral rating if the offeror has no relevant past performance information. Price: The Government will evaluate price for reasonableness. Price will be evaluated based on the cumulative total of all the line item prices, IAW FAR 52.217-5. Past Performance and Price shall not be evaluated on quotes that are determined technically unacceptable under the Technical Capability Evaluation factor. 1352.233-70 AGENCY PROTESTS (APR 2010) (a) An agency protest may be filed with either (1) the Contracting Officer, or (2) at a level above the Contracting Officer, with the agency Protest Decision Authority. See 64 Fed. Reg. 16,651 (April 6, 1999). (b) Agency protests filed with the Contracting Officer shall be sent to the following address: NIST/ACQUISITION MANAGEMENT DIVISION ATTN: PATRICK STAINES, CONTRACTING OFFICER 100 Bureau Drive, MS 1640 Gaithersburg, MD 20899 (c) Agency protests filed with the Protest Decision Authority shall be sent to the following address: NIST/ACQUISITION MANAGEMENT DIVISION ATTN: HEAD OF THE CONTRACTING OFFICE (HCO) 100 Bureau Drive, MS 1640 Gaithersburg, MD 20899 (d) A complete copy of all agency protest, including all attachments, shall be served upon the Contract Law Division of the Office of the General Counsel within one day of filing a protest with either the Contracting Officer or the Protest Decision Authority. (e) Service upon the Contract law Division shall be made as follows: U.S. Department of Commerce Office of the General Counsel Chief, Contract Law Division Room 5893 Herbert C. Hoover Building 14th Street and Constitution Avenue, N.W. Washington, D.C. 20230 FAX: (202) 482-5858 1352.233-71 GAO AND COURT OF FEDERAL CLAIMS PROTESTS (APR 2010) (a) A protest may be filed with either the Government Accountability Office (GAO) or the Court of Federal Claims unless an agency protest has been filed. (b) A complete copy of all GAO or Court of Federal Claims protests, including all attachments, shall be served upon (i) the Contracting Officer, and (ii) the Contract Law Division of the Office of the General Counsel, within one day of filing a protest with either GAO or the Court of Federal Claims. (c) Service upon the Contract Law Division shall be made as follows: U.S. Department of Commerce Office of the General Counsel Chief, Contract Law Division Room 5893 Herbert C. Hoover Building 14th Street and Constitution Avenue, N.W. Washington, D.C. 20230 FAX: (202) 482-5858 (End of clause)
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