MODIFICATION
66 -- Automated Solution Coating System
- Notice Date
- 1/26/2011
- Notice Type
- Modification/Amendment
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- RDECOM Contracting Center - Adelphi (RDECOM-CC), ATTN: AMSRD-ACC, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX11T0038
- Response Due
- 2/2/2011
- Archive Date
- 4/3/2011
- Point of Contact
- Phillip J. Amador, 575-678-3523
- E-Mail Address
-
RDECOM Contracting Center - Adelphi (RDECOM-CC)
(phillip.j.amador@us.army.mil)
- Small Business Set-Aside
- Total Small Business
- Description
- (i) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) The solicitation number is W911QX-11-T-0038. This acquisition is issued as a request for quote (RFQ). (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-48. (iv) This acquisition is set-aside for small business (SB). The associated NAICS code is 334516. The small business size standard is 500. (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable): CLIN 0001, AUTOMATED SOLUTION COATING SYSTEM, QTY one (1), EA; CLIN 0002, OPTIONAL SPIN CHUCK OCSILLATION CAPABILITY, QTY one (1), EA; CLIN 0003, OPTIONAL SECOND ANNEALING MODULE, QTY one (1), EA; CLIN 0004, OPTIONAL ANNEALING MODULE WITH A MAXIMUM OPERATING TEMP, QTY one (1), EA; CLIN 0005, OPTIONAL ADDITIONAL SPARE PARTS, QTY one (1), EA; CLIN 0006, OPTIONAL PUMP AND FILTER ASSEMBLY, QTY one (1), EA; CLIN 0007, SHIPPING CHARGES TO ADELPHI, MD 20783-1197, QTY one (1) LOT (vi) Description of requirements: Automated solution coating system configured with spin dispense and bake modules for the processing of chemical solution deposited (CSD) piezoelectric thin films and meeting the following requirements: Properties and values of required deposited materials: Uniformity across wafer [percent ]-Less than or equal to plus or minus 3.0; Uniformity wafer to wafer in batch [percent ]- Less than or equal to plus or minus 3.0; Uniformity across run [percent ]- Less than or equal to plus or minus 3.0; Uniformity run to run [percent] - Less than or equal to plus or minus 3.0. Solution Deposited Materials: Lead zirconate titanate (PZT) using a 2-Methoxyethanol solvent (note - toxic solvent); Lead zirconate titanate (PZT) using a butyl alcohol solvent; Lead zirconate titanate (PZT) using a methanol solvent; Lead titanate (PT) using a 2-Methoxyethanol solvent (note - toxic solvent); Lead titanate (PT) using a butyl alcohol solvent; Lead titanate (PT) using a methanol solvent Coating system including a Robotic handler that supports 100 millimeter (mm) and 150mm diameter substrates; Chill plate with operational temperatures ranging from 20 degrees Celsius to 40 degrees Celsius; Spin module with the following: Able to spin low viscosity (~0.2 to 2 centipoise) solutions comprised of solvents such as methanol, butyl alcohol, and 2-methoxyethanol. Capable of dispensing at least four (4) different solutions from canister configured nozzles and dispensing from at least two (2) syringe nozzles. Capable of automatically dispensing solutions from operated loaded syringe (two (2) total syringe dispense heads) configured with 177 milliliter (mL) cartridges and 55 cubic centimeter (cc) barrels. Configured to dispense solvent from one of the canister configured nozzles with an integrated pump. Dispense volume controlled to within plus or minus 0.01 milliliter (mL). All solutions dispensable through a filter with a maximum pore size no larger than 0.2 micrometer ( m). Integrated backside wafer clean. Integrated bowl clean/wash or solvent moat/drip to prevent precipitate formation from excess solution that has been spun from wafer surface. All solvent and used solution is directed from the spinner basin to a containment system. Said containment system equipped with automatic level detection to alert operator that container requires changing. Integrated dispense tip cleaning or vapor tip bath to prevent precipitate formation at the nozzle tip. Dispense capability while moving dispense arm (for both syringe and pump aided dispensing) to aid with solutions with poor surface wetting attributes. Coating thickness performance requirements, Par 1 (can be evaluated on materials other than the targeted materials for the coater from Par 2). Across wafer uniformity better than three percent. Wafer-to-wafer uniformity better than three percent. Option CLIN 0002 - Spin chuck oscillation capability during solution dispense to aid with solutions with poor surface wetting attributes. Backside wafer clean module that is able to be directly incorporated into spin module. Hot plate or anneal module with a maximum operating temperature of at least 500 degrees Celsius and the following: Maximum operating temperature of at least 500 degrees Celsius. Atmospheric pressure operation. Atmospheric control with at least three (3) gas lines (Argon (Ar), Nitrogen (N2), Oxygen (O2)) and preferably controlled via mass flow controllers. Integrated pre-mixing of gas prior to entry into processing chamber. Across wafer temperature uniformity of plus or minus one (1) percent over full temperature range with no oscillations in temperature. Temperature ramp maximum of at least twenty (20) degrees Celsius per second. Integrated cooling to reduce wafer temperature prior to moving to next module with coating system. Software controlled to allow for multi-layer coatings using recursive process flows (e.g. spin-anneal-chill-spin-anneal, etc.). Fully exhausted such that all vapors generated from the spin module and anneal modules are captured and able to be sent through the Army Research Laboratory's (ARL's) scrubbed exhaust. Electrical components based on voltages, frequency and currents commonly used in the USA. Class 100 compatibility in its entirety. Process programming and history logging backup through a disk drive based system (3.5" Floppy and/or a CD-RW), and/or a USB port for flash drive storage. Capable of being operated in 1) automatic mode utilizing programmed process operations, 2) semi-automatic mode utilizing safety interlock features, or 3) manual mode allowing independent control of all operating components. Ability to meet current industry standard requirements for safety including the use of Emergency Off (EMO) panic buttons, shielding and interlocks for hazardous areas including high voltages and moving parts. All software shall be the most current. All new software issues and upgrades shall be provided to the Government for three (3) years after the acceptance of the tool at no additional cost. Standard spare parts kit consisting of items subject to relatively rapid wear such as would normally be provided to "7 x 24" customers. Include valves, "O" rings, relays, etc. A list of all wearable items shall be provided. Two (2) complete sets of electrical diagrams and operating manuals written in English. One (1) of the two (2) manuals provided shall be on clean room paper. Option CLIN 0003: A second annealing module with the same capabilities as those for the aforementioned annealing module. Option CLIN 0004: An annealing module with a maximum operating temperature of at least 600 degrees Celsius with the remaining capabilities the same as the aforementioned annealing module. Option CLIN 0005: Standard Spare parts kit including o rings, valves, bowl inserts, dispense tips/nozzles, contractor shall include a detailed description of spare parts kit proposed. Option CLIN 0006: Pump and filter assembly to enable spinner dispense lines. Pre-delivery Acceptance Tests: The Government will have the option to witness pre-delivery acceptance testing of the coating system at the manufacturer's site before delivery. The acceptance tests shall include a demonstration of any or all of the herein listed specifications The Contractor shall prove to the Government that the coating system is fully functional at the Contractor's facility using the following Government created acceptance tests: Demonstration that the coating system meets base specifications, which includes wafer handling, thermal processing temperatures, ramp rates, temperature uniformity, gas line configuration, spin dispense capability, and computer control. Demonstration that the coating system is operationally functional, including: Substrate handling queuing, and processing for at least 200 wafers (100 millimeters (mm) in diameter); Chill plate module: Operational temperatures ranging from 20 degrees Celsius to 40 degrees Celsius; Bake module: Operating with a temperature range of operation of at least room temperature to 500 degrees Celsius; Demonstrate temperature heating rate of at least 20 degrees Celsius per second; Configured with three (3) gas lines (for Nitrogen (N2), Oxygen (O2) and Argon (Ar)); Spin dispense module: Operating with a spin bowl mote and fountain solvent drip; Capable with backside wafer clean with solvent; Configured with two (2) syringe dispense stations each with 177 milliliter (mL) cartridges and 55 cubic centimeter (cc) barrels; Integrated dispense tip cleaning or vapor tip bath to prevent precipitate formation at the nozzle tip; Capable of operating at spin speeds ranging from 10 revolutions per minute (rpm) to 9000 rpm; Demonstrate solvent deposition using syringes on fifty (50) wafers; Demonstrate control of solution dispense to within 0.01 milliliter (mL); Solvent dispense to rinse bowl; Operation of alarm indicator for changing solvent containment in bowl waste. Pre-delivery Acceptance Tests Report. The Contractor shall submit a pre-delivery acceptance tests report to the Government outlining the results of the acceptance tests. The Government will approve the acceptance test report within one (1) week of receiving the results. The Contractor shall ship the coating system only after the Government has authorized the test results. Delivery and Installation. Delivery and install the coating system to the Army Research Laboratory (ARL), 2800 Powder Mill Road, Building 207, Room 3B-41, Adelphi, MD 20783 within two (2) weeks of receiving approval of the acceptance test report. Post-installation Acceptance Tests. The Contractor shall prove to the Government that the coating system is fully functional after the system has been installed in room 3B-41 at ARL using the following Government created acceptance tests: Demonstration that the coating system meets base specifications, which includes wafer handling, thermal processing temperatures, ramp rates, temperature uniformity, gas line configuration, spin dispense capability, and computer control. Demonstration that the coating system is operationally functional, which includes substrate handling queuing, and processing for at least 200 wafers (100mm in diameter) :Chill plate module: Operational temperatures ranging from 20 degrees Celsius to 40 degrees Celsius; Bake module: Operating with a temperature range of operation of at least room temperature to 500 degrees Celsius; Demonstrate temperature heating rate of at least 20 degrees Celsius per second; Configured with three (3) gas lines (for Nitrogen (N2), Oxygen (O2) and Argon (Ar)); Spin dispense module: Operating with a spin bowl mote and fountain solvent drip; Capable with backside wafer clean with solvent; Configured with two (2) syringe dispense stations each with 177mL cartridges and 55 cc barrels; Integrated dispense tip cleaning or vapor tip bath to prevent precipitate formation at the nozzle tip; Capable of operating at spin speeds ranging from 10 rpm to 9000 rpm; Demonstrate solvent deposition using syringes on fifty (50) wafers; Demonstrate PZT solution deposition on 25 wafers measuring the film thickness to determine across wafer and wafer-to-wafer thickness uniformity; Demonstrate control of solution dispense to within 0.01 mL; Solvent dispense to rinse bowl; Operation of alarm indicator for changing solvent containment in bowl waste. Post-installation Acceptance Tests Report. The Contractor shall submit a post-installation acceptance test report to the Government outlining the results of the acceptance tests. The Government will approve the acceptance test report within one (1) week of receiving the results. Operator and Maintenance Training. Conduct operator and maintenance training following the installation of the coating system at the Government's site and within one (1) month of receiving acceptance test report approval from the Government. For the training purposes, the Contractor shall travel to the Army Research Laboratory (ARL) in Adelphi, Maryland, to provide one (1) day of operator and maintenance training for up to eight (8) participants. Troubleshooting. Provide access to a technical support person to answer questions regarding tool operation, hardware troubleshooting and basic photoresist process via telephone or email during normal business hours for the time zone of the Contractor's main base of operation. Warranty. The day the Government approves the post-installation report, the Contractor shall provide a warranty on the coating for one (1) year that covers parts (excluding consumable parts and materials); covers repairs or modifications if the coating system is no longer functional according to the acceptance test specifications; covers labor and transportation costs (including airfare, accommodation and per diems) to and from ARL for the technical support individual if necessary; guarantees a response time of 48 hours from the time the Government calls or emails in a request for service. (vii) Delivery is required by fifteen (15) weeks after receipt of order (ARO). Delivery shall be made to US Army Research Laboratory (ARL), 2800 Powder Mill Road, Building 207, Room 3B-41, Adelphi, MD, 20783. Acceptance shall be performed at the same location. The FOB point is destination. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: NONE (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforms to the solicitation and will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: Technical, Past Performance and Price. The Technical element of the evaluation will be a determination as to whether the proposed product meets the performance characteristics and specifications in the solicitation. The Technical element of the evaluation shall be based solely on information furnished by the vendor. The Government is not responsible for locating or securing any information, which is not identified in the proposal. To ensure sufficient information is available, vendors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the Government to determine whether the product meets the performance characteristics and specifications of the requirement. If the offeror proposes to modify a product so as to conform to the requirement of this solicitation, the offeror shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Past performance will be evaluated based on information provided by the offeror as to actual sales of the proposed product to industry or Government agencies. Past performance will consider the ability of the offeror to meet technical specifications, delivery schedules (with warranty fulfillment and maintenance reputation included as applicable). Offerors shall include three (3) records of sales from the previous twenty-four (24) months. Offerors shall identify a point of contact for each sale by providing a name and telephone number. Price will be evaluated based on the total proposed price, including options, (if any).Technical and past performance are of equal importance and when combined are significantly more important than price. The Government reserves the right to award to other than the lowest price and to award without discussions. OPTIONS. The Government will evaluate offers for award purposes by adding the total price for all options selected to the total price for the basic requirement. The Government may determine that an offer is unacceptable if the option prices are significantly unbalanced. Evaluation of options shall not obligate the Government to exercise the option(s). (x) Offerors shall complete the annual representations and certificates electronically at http://orca.bpn.gov or include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items with its offer. Offerors shall include DFARS 252.212-7000, Offeror Representations and Certifications -Commercial Items, with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: NONE (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: 52.203-3 Gratuities (APR 1984), 52.203-6 Alternate I, Restrictions on Subcontractor Sales to the Government (Oct 1995), 52.203-13 Contractor Code of Business Ethics and Conduct (APR 2010), 52.204-7 Central Contractor Registration (JUL 2006), 52.204-10 Reporting Executive Compensation and First-Tier Subcontract Awards (Jul 2010), 52.209-6 Protecting the Government's Interest When Subcontracting with contractors Debarred, Suspended, or Proposed for Debarment (Dec 2010), 52.219-6 Notice of Total Small Business Set-Aside (JUN 2003), 52.219-8 Utilization of Small Business Concerns, 52.219-14 Limitations on Subcontracting (Dec 1996), 52.219-28 Post Award Small Business Program Representation (JUN 2007), 52.222-3 Convict Labor (JUN 2003), 52.222-19 Child Labor-Cooperation with Authorities and Remedies (JAN 2006), 52.222-21 Prohibition of Segregated Facilities (FEB 1999), 52.222-26 Equal Opportunity (APR 2002), 52.222-35 Equal Opportunity for Special Disabled Veterans of the Vietnam Era, and Other Eligible Veterans (DEC 2001), 52.222-36 Affirmative Action for Workers with Disabilities (JUNE 1998), 52.222-37 Employment Reports on Special Disabled Veterans of the Vietnam Era, and Other Eligible Veterans (DEC 2001), 52.222-40 Notification of Employee Rights Under the National Labor Relations Act (Dec 2010), 52.222-50 Combating Trafficking in Persons (Feb. 2009), 52.223-18 Contractor Policy to Ban Text Messaging while Driving (Sep 2010), 52.225-13 Restrictions on Certain Foreign Purchases (Jun 2008), 52.226-6 Promoting Excess Food Donation to Nonprofit Organizations (Mar 2009), 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration (OCT 2003), 52.233-3 Protest After Award (AUG 2007), 52.233-4 Applicable Law for Breach of Contract Claim (OCT 2004), 252.203-7000, Requirements Relating to Compensation of Former DoD Officials (JAN 2009), 252.211-7003 Item Identification and Valuation (AUG 2008), 252.211-7003 Item Identification and Valuation Alternate I (AUG 2008), 252.225-7001 Buy American Act and Balance of Payments Program (JUN 2005), 252.225-7002 Qualifying Country Sources as Subcontractors (APR 2003), 252.225-7012 Preference for Certain Domestic Commodities (JUN 2010), 252.225-7036 Buy American Act-Free Trade Agreements--Balance of Payments Program (DEC 2010), 252.227-7015 Technical Data - Commercial Items (NOV 1995), 252.232-7003 Electronic Submission of Payment Requests (JAN 2004), 252.243-7002 Request for Equitable Adjustment 2005 (MAR 1998), 252.247-7023 Transportation of Supplies by Sea (MAY 2002) (xiii) The following additional contract requirement(s) or terms and conditions apply: 52.004-4407 Type of Contract; 52.004-4409 RDECOMAC Point of Contact; 52.004-4411 Technical Point of Contact; 52.005-4401 Release of Information; 52.011-4401 Receiving Room Requirements; 52.032-4418 Tax Exemption Certification; and 52.032-4431 Wide Area Workflow (WAWF) Payment Instructions. A copy of the full text of these provisions will be made available upon request. (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as: NONE. (xv) The following notes apply to this announcement: 1. Questions that were brought to the attention of the Government have been complied into a Questions and Answers document attached to this solicitation. 2. All questions are due on 31 January 2011, by 12:00 PM MST, via email to phillip.j.amador@arl.army.mil. No questions will be accepted past this date. 3. If any additional questions are submitted on-time, these questions will also be answered and posted as a seperate attachment in a following amendment. (xvi) Offers are due on 02 February 2011, by 12:00 PM MST, via email to phillip.j.amador@arl.army.mil (xvii) For information regarding this solicitation, please contact Phillip J. Amador, 575-678-3523, phillip.j.amador@arl.army.mil
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/notices/21db04be318addc8f80bde6794692b69)
- Place of Performance
- Address: RDECOM Contracting Center - Adelphi (RDECOM-CC) ATTN: AMSRD-ACC, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Zip Code: 20783-1197
- Record
- SN02366970-W 20110128/110126234057-21db04be318addc8f80bde6794692b69 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |