Loren Data's SAM Daily™

FBO DAILY ISSUE OF JUNE 04, 2010 FBO #3114
MODIFICATION

66 -- The National Institute of Standards and Technology is seeking to purchase a Critical Dimension (CD) measuring microscope.

Notice Date

6/2/2010
 

Notice Type

Modification/Amendment
 

NAICS

334516 — Analytical Laboratory Instrument Manufacturing
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
 

ZIP Code

20899-1640
 

Solicitation Number

SB1341-10-RQ-0378
 

Point of Contact

Janet M. Lamb, Phone: 3019756205, Todd D Hill, Phone: 301-975-8802
 

E-Mail Address

janet.lamb@nist.gov, todd.hill@nist.gov
(janet.lamb@nist.gov, todd.hill@nist.gov)
 

Small Business Set-Aside

N/A
 

Description

The purpose of this Amendment is to post Questions and Answers: 1. Are the feature sizes actually.4um or are you looking for a measuring resolution of.4um or better? If the feature sizes are actually.4um and smaller, this is at or approaching the limit of traditional microscope’s optical resolution and may require a different type of microscope system, such as a confocal microscope which can optically resolve features of this size. Q1. The microscope (either traditional or confocal) should be able to measure features down to 0.4 microns. In other words, 0.4 microns is the smallest feature I am looking to measure. 2. The second question is related to the “Sidewall angle measurement” in the Evaluation Criteria Section. Can you provide any additional information on this measurement? Q2. A linewidth or space is usually not a perfect 90 degree angle. If a system can use intensity profiles to measure sidewall angles of the features, that would be an added benefit, but not required.
 

Web Link

FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-10-RQ-0378/listing.html)
 

Place of Performance

Address: 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States

Zip Code: 20899
 

Record

SN02166801-W 20100604/100602235719-e60ce32b5fce6bdbd2c144405747481e (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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