Loren Data's SAM Daily™

FBO DAILY ISSUE OF MARCH 21, 2010 FBO #3039
SOLICITATION NOTICE

66 -- Hydrofluoric Acid Vapor Etching System

Notice Date

3/19/2010
 

Notice Type

Combined Synopsis/Solicitation
 

NAICS

334516 — Analytical Laboratory Instrument Manufacturing
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
 

ZIP Code

20899-1640
 

Solicitation Number

SB1341-10-RQ-0237
 

Archive Date

4/17/2010
 

Point of Contact

Charles Koehler,
 

E-Mail Address

charles.koehler@nist.gov
(charles.koehler@nist.gov)
 

Small Business Set-Aside

N/A
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-38. The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) supports the development of nanotechnology through research on measurement and fabrication methods, standards and technology, and by operating a nanofabrication facility. The CNST requires a hydrofluoric acid vapor etching system (HFVE) to etch silicon dioxide on wafers and chips for nanofabrication applications. All responsible quoters shall provide a quotation with consideration to all of the minimum specifications as follows: A. The HFVE system must use hydrofluoric acid (HF) vapor to etch silicon dioxide. The liquid HF used to generate the vapor must be able to be 49% HF or a mixture of 49% HF and organic solvents; B. The HFVE system must be able to etch wafers with a diameter of 75 mm, 100 mm and 150 mm diameter, as well as chips as small as 5 mm; C. The silicon dioxide etch rate must cover the range from 4 micrometers/hour to 25 micrometers/hour; D. The HFVE system must consist of a reaction chamber, a heated wafer/chip holder, an HF storage container and temperature control unit. The expected process will be as follows: a. The wafer/chip is loaded onto the holder. b. The wafer/chip holder is loaded onto the reaction chamber. c. The holder is heated to the desired temperature. d. HF is transferred from the storage container into the reaction chamber. e. The etching proceeds. E. The HFVE system must be designed to work within an acid fume hood and have a volume smaller than 600 mm length x 450 mm depth x 400 mm height; F. The temperature of the wafer/chip holder must be controlled by an electronics module that can achieve at least 1 degree Celsius resolution and can operate between room temperature and 60 degrees Celsius; G. The temperature control module must be able to sit outside of the acid fume hood and therefore should have cables that are sufficiently long; H. As a measure of etching uniformity, the standard deviation of the etched material must be no greater than 30% of the amount of material etched. For example, if 1 micrometer is etched, the standard deviation across the wafer must be no greater than 300 nm (quotation must provide data to satisfy this specification); I. Wafers must be held by a clamping ring that protects the back side of the wafer and blocks no more than 5 mm from the edge of the front side of the wafer; J. An electrostatic clamping holder must be provided to hold small chips and odd-sized parts; and K. The HF container must hold at least 200 mL. Although not required as minimum specifications, the following will be considered advantageous upon consideration of all quotations submitted: A. Better etching uniformity than listed above, and B. The ability to pump-out the reaction chamber and purge with nitrogen. The exhaust will be plumbed to the ventilation exit of the acid fume hood. DELIVERY Delivery must be completed no later than 60 days after receipt of order. All line items shall be delivered to NIST, ATTN: Shipping and Receiving, 100 Bureau Drive, Gaithersburg, Maryland, 20899. Delivery term shall be FOB Destination regardless of prepaid freight. The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. FINAL ACCEPTANCE Final acceptance shall be provided and payment in full shall be made upon receipt and acceptance of all line items. EVALUATION CRITERIA AND BASIS FOR AWARD Award will be made on a technically acceptable/best value basis. Technically acceptable means that all of the minimum technical specifications are met as required by this solicitation. Of the technically acceptable quotations, overall value, not necessarily relating only to price, shall be the determining factor. REQUIRED SUBMISSIONS All quoters shall submit the following: 1) An original and one copy of a price quotation which addresses all line items; 2) This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition." OR The offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s). Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the offeror's FSS or GWAC contract, and the statement required above shall be included in the quotation. 3) In accordance with Federal Acquisition Regulation (FAR) clause 52.204-7, the successful quoter must be registered in the Central Contractor Registration (CCR) prior to award. Reference www.ccr.gov for details. Refusal to register shall forfeit award of a purchase order. DUE DATE FOR QUOTATIONS All quotations shall be sent via E-mail to Charles Koehler at charles.koehler@nist.gov. Quotations submitted via any other means will not be acknowledged nor honored. The due date for quotations is April 2, 2010, at 12:00 PM ET. PROVISIONS AND CLAUSES The full text of a FAR provision or clause may be accessed electronically at www.acqnet.gov/far. The following provisions apply to this acquisition: 52.212-1, Instructions to Offerors - Commercial; 52.212-3, Offeror Representations and Certifications - Commercial Items. In accordance with FAR 52.212-3 Offeror Representations and Certifications - Commercial Items, offerors must complete annual representations and certifications on-line at http://orca.bpn.gov. If paragraph (j) of the provision applies, a written submission is required; The following clauses apply to this acquisition: 52.212-4 Contract Terms and Conditions-Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: 52.219-28, Post-Award Small Business Program Representation; 52.222-3, Convict Labor; 52.222-19, Child Labor-Cooperation with Authorities and Remedies; 52.222-21, Prohibition of Segregated Facilities; 52.222-26, Equal Opportunity; 52.222-36, Affirmative Action for Workers with Disabilities; 52.225-1; Buy American Act-Supplies; 52.225-13 Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129; and 52.232-33, Payment by Electronic Funds Transfer--Central Contractor Registration and Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm.
 

Web Link

FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-10-RQ-0237/listing.html)
 

Place of Performance

Address: 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States

Zip Code: 20899
 

Record

SN02097453-W 20100321/100319234827-58ceda79dc8a7f2ce7ede1db97b298bd (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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