SOLICITATION NOTICE
36 -- Hydrofluoric Acid Vapor Phase Etcher - RFQ Form SF-18
- Notice Date
- 2/19/2010
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333314
— Optical Instrument and Lens Manufacturing
- Contracting Office
- Department of Commerce, National Oceanic and Atmospheric Administration (NOAA), Western Acquisition Division-Boulder, 325 Broadway - MC3, Boulder, Colorado, 80305-3328, United States
- ZIP Code
- 80305-3328
- Solicitation Number
- RA1341-10-RQ-0337DR
- Archive Date
- 2/24/2010
- Point of Contact
- DianaRomero, Phone: 303-497-3761
- E-Mail Address
-
diana.romero@noaa.gov
(diana.romero@noaa.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- RFQ Form SF-18 COMBINED SYNOPSIS/SOLICITATION Hydrofluoric Acid Vapor Phase Etecher (I) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice and in accordance with the simplified acquisition procedures authorized in FAR Part 13. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (II) This solicitation is issued as a request for quotation (RFQ). Submit written quotes on RFQ Number RA1341-10-RQ-0337DR. (III) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-38. (IV) This solicitation is being issued as a Total Small Business Set-Aside. The associated NAICS code is 333314. The small business size standard is 500 employees. (V) This combined solicitation/synopsis is for purchase of the following commercial item: CLIN # 0001 IDONUS VPE 100 HYDROFLUORIC ACID VAPOR PHASE ETCHER REACTION CHAMBER HEATING ELEMENT POWER SUPPLY IN ACCORDANCE WITH THE SPECIFICATIONS. Quantity one (1) EACH. CLIN # 0002 ELECTROSTATIC CHUCK FOR PHASE ETCHER IN ACCORDANCE WITH THE SPECIFICATIONS. Quantity one (1) EACH. CLIN # 0003 ADAPTOR RING FOR 75mm WAFERS IN ACCORDANCE WITH THE SPECIFICATIONS. Quantity one (1) EACH. CLIN # 0004 SAFETY MESH IN ACCORDANCE WITH THE SPECIFICATIONS. Quantity one (1) EACH. (VI) Description of requirements is as follows: Specifications: The Quantum Electrical Metrology Division requires an HF Vapor Etcher for safe and reproducible etching of silicon dioxide using HF acid vapor in a controlled environment. Main Requirements: Wafer holder compatible with both 100 mm and 3" wafers Wafer heater, 35-60 °C Small etchant volume Safe HF handling Small footprint and utility requirements Preferred options: Electrostatic wafer/chip holder Mesh to prevent dropping released parts into HF (VII) Required delivery 45 days ARO. Place of delivery is 325 Broadway, Building 22, Boulder, CO 80305-3328. Delivery shall be FOB Destination, quote shall include all shipping charges, if applicable. (VIII) FAR 52.212-1, Instructions to Offerors -- Commercial Items (JUN 2009), applies to this acquisition. In addition to written price quotes, offers are instructed to complete and return the attached SF-18. (IX) FAR 52.212-2, Evaluation - Commercial Items (JAN 1999), applies to this acquisition. Paragraph (a) is hereby completed as follows: the Government will award a firm fixed price contract resulting from this solicitation to the responsible offeror whose offer conforming to the solicitation will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: a) technical capability-offers shall meet all specifications b) delivery-offers must state delivery time; c) price. (X) The offeror must submit a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items (AUG 2009), with its quote. An offeror shall complete only paragraph (b) of this provision if the offeror has completed the annual representations and certifications electronically at http://orca.bpn.gov. If an offeror has not completed the annual representations and certifications electronically at the ORCA website, the offeror shall complete only paragraphs (c) through (m) of this provision. (XI) The clause at FAR 52.212-4, Contract Terms and Conditions - Commercial Items (MAR 2009), applies to this acquisition. (XII) The clause at FAR 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items (FEB 2010) applies to this acquisition. The following clauses under subparagraph (b) apply: (8)(i) 52.219-6, Notice of Total Small Business Set-Aside (June 2003) (15 U.S.C. 644). __ (ii) Alternate I (Oct 1995) of 52.219-6. __ (iii) Alternate II (Mar 2004) of 52.219-6. (18) 52.219-28, Post Award Small Business Program Rerepresentation (Apr 2009) (15 U.S.C. 632(a)(2)). (19) 52.222-3, Convict Labor (June 2003) (E.O. 11755). (20) 52.222-19, Child Labor-Cooperation with Authorities and Remedies (Aug 2009) (E.O. 13126). (21) 52.222-21, Prohibition of Segregated Facilities (Feb 1999). (22) 52.222-26, Equal Opportunity (Mar 2007) (E.O. 11246). (24) 52.222-36, Affirmative Action for Workers with Disabilities (Jun 1998) (29 U.S.C. 793). (30) 52.225-1, Buy American Act-Supplies (Feb 2009) (41 U.S.C. 10a-10d). (33) 52.225-13, Restrictions on Certain Foreign Purchases (June 2008) (E.O.'s, proclamations, and statutes administered by the Office of Foreign Assets Control of the Department of the Treasury). (38) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration (Oct 2003) (31 U.S.C. 3332). The following clauses under subparagraph (c) apply: none. (XIII) The following clauses are also applicable to this acquisition: 52.214-34 Submission of Offers in the English Language (Apr 1991) 52.214-35 Submission of Offers in U.S. Currency (Apr 1991) Department of Commerce Clause: 1352-215-73 Inquires (March 2000) Offerors must submit all questions concerning this solicitation in writing to the Purchasing Agent. They must be received no later than 12:00 pm February 22, 2010. All responses to the questions will be made in writing and included in an amendment to the solicitation. (XIV) Defense Priorities and Allocations System (DPAS) and assigned rating does not apply. (XV) Quotes are required to be received in the contracting office no later than 4:00 P.M. MDT on February 23, 2009. All quotes must be faxed or emailed to the attention of Diana Romero. The fax number is (303) 497-7719 and email address is Diana.romero@noaa.gov. (XVI) Any questions regarding this solicitation should be directed to Diana Romero, 303-497-3761, Diana.romero@noaa.gov.
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