SOLICITATION NOTICE
66 -- Photoresist Coat-Bake System for Single Wafer Processing
- Notice Date
- 4/14/2009
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334413
— Semiconductor and Related Device Manufacturing
- Contracting Office
- Department of Commerce, National Oceanic and Atmospheric Administration (NOAA), Mountain Region Acquisition Division, 325 Broadway - MC3, Boulder, Colorado, 80305-3328
- ZIP Code
- 80305-3328
- Solicitation Number
- RA1341-09-RQ-0421DR
- Archive Date
- 4/22/2009
- Point of Contact
- DianaRomero,, Phone: 303-497-3761
- E-Mail Address
-
diana.romero@noaa.gov
- Small Business Set-Aside
- Total Small Business
- Description
- COMBINED SYNOPSIS/SOLICITATION Photoresist Coat-Bake System for Single Wafer Processing (I) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice and in accordance with the simplified acquisition procedures authorized in FAR Part 13. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (II) This solicitation is issued as a request for quotation (RFQ). Submit written quotes on RFQ Number RA1341-09-RQ-0421DR. (III) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-32. (IV) This solicitation is total small business set aside. The associated NAICS code is 334413. The small business size standard is 500 employees. (V) This combined solicitation/synopsis is for purchase of the following commercial item(s)/services: CLIN NO. 0001 - Brand Name or Equal to Brewer Science Model Cee 200CB Coat Bake System (VI) Description of requirements is as follows: Salient Characteristics: -The ability to spin coat and bake on 3 inch, 100 mm and 150 mm round wafers. - Automated dispensing of up to 4 photoresists including controllable dispense volume. - Photoresist dispense and storage must be compatible with low-volume and infrequent-use applications. - Automated edge-bead removal. - Automated back-side rinse. - Closed bowl for vapor and solvent control with automated exhaust control. - Spin speeds from 0 to 6000 RPM. - Spin speed acceleration of 0-20000 RPW second for a 150mm wafer. - Spin speed repeatability: <0.5 RPM. - Spin speed resolution: <0.5 RPM. - Bake temperatures from 50 to 300 C. - Bake uniformity of better than 0.5 %across the hotplate working area. - Automated control of bake modes including N2 proximity and hard vacuum - Automated hot plate lift pins for control of baking times and modes. - Computer or logic control of all parameters above. At least 100 recipes for both coating and baking. - This unit must be compatible with flange mounting in one of our existing clean exhaust hoods (approximately 1 meter x.3 meter hood footprint). -spinner drive mechanism is of the indirect type. (VII) Required delivery 60 days ARO. Place of delivery is 325 Broadway, Bldg. 22, Boulder, CO 80305-3328. Delivery shall be FOB Destination. (VIII) FAR 52.212-1, Instructions to Offerors -- Commercial Items (Jun 2008), applies to this acquisition. In addition to written price quotes, offers are instructed to provide the brand name of an "equal" product, including manufacturer and model no. (IX) FAR 52.212-2, Evaluation - Commercial Items (Jan 1999), applies to this acquisition. Offers will be evaluated based on price and the factors set forth in paragraph (a), and award will be made to the firm offering the best value to the Government. Paragraph (a) is hereby completed as follows: Award will be made based to the Contractor whose quote offers the best value to the Government, price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Compatibility, 2) Past Performance, 3) Delivery, 4) Warranty, and 5) Price. 1) Technical Capability - the RFQ shall address all the salient characteristic outlined above and shall provide indication of product offered meets or exceeds requirements. 2) Past Performance - the RFQ shall include no fewer than three (3) references, including address, phone number, and point of contact, from users who recently been sold equivalent of the proposed items. Past performance will be evaluated in terms of quality, timeliness, and customer satisfaction. 3) Delivery - the RFQ shall state delivery time. 4) Warranty -the RFQ shall indicate the term of the warranty, if any apply. 5) Price (X) The offeror must submit a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items (Feb 2009), with its quote. An offeror shall complete only paragraph (b) of this provision if the offeror has completed the annual representations and certifications electronically at http://orca.bpn.gov. If an offeror has not completed the annual representations and certifications electronically at the ORCA website, the offeror shall complete only paragraphs (c) through (m) of this provision. (XI) The clause at FAR 52.212-4, Contract Terms and Conditions - Commercial Items (Mar 2009), applies to this acquisition. (XII) The clause at FAR 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items (Mar 2009) applies to this acquisition. The following clauses under subparagraph (b) apply: (18) 52.219-28, Post Award Small Business Program Rerepresentation (June 2007) (15 U.S.C. 632(a)(2)). (19) 52.222-3, Convict Labor (June 2003) (E.O. 11755). (20) 52.222-19, Child Labor-Cooperation with Authorities and Remedies (Feb 2008) (E.O. 13126). (21) 52.222-21, Prohibition of Segregated Facilities (Feb 1999). (22) 52.222-26, Equal Opportunity (Mar 2007) (E.O. 11246). (24) 52.222-36, Affirmative Action for Workers with Disabilities (Jun 1998) (29 U.S.C. 793). (31) 52.225-1, Buy American Act-Supplies (June 2003) (41 U.S.C. 10a-10d). (34) 52.225-13, Restrictions on Certain Foreign Purchases (June 2008) (E.O.'s, proclamations, and statutes administered by the Office of Foreign Assets Control of the Department of the Treasury). (39) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration (Oct 2003) (31 U.S.C. 3332). The following clauses under subparagraph (c) apply: None in this subparagraph apply. (XIII) The following clauses are also applicable to this acquisition: 52.252-2 Clauses Incorporated By Reference (Feb 1998) This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es): http:www.arnet.gov (End of clause) The following additional terms and conditions apply: 52.214-34 Submission of Offers in the English Language (Apr 1991) 52.214-35 Submission of Offers in U.S. Currency (Apr 1991) 52.211-6 Brand Name or Equal (Aug 1999) (XIV) Defense Priorities and Allocations System (DPAS) and assigned rating does not apply. (XV) The Government intends to award a firm-fixed-price type order resulting from this solicitation. Quotes are required to be received in the contracting office no later than 12:00 P.M. MST/MDT on April 20, 2009. All quotes must be faxed or emailed to the attention of Diana Romero. The fax number is (303) 497-7791 and email address is Diana Romero@noaa.gov (XVI) Any questions regarding this solicitation should be directed to Diana Romero, 303-497-3761, Diana.Romero@noaa.gov.
- Web Link
-
FedBizOpps Complete View
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- Place of Performance
- Address: 325 Broadway, Boulder, Colorado, 80305, United States
- Zip Code: 80305
- Zip Code: 80305
- Record
- SN01792287-W 20090416/090414220913-a064d117d12de7abfa5877b30f87d832 (fbodaily.com)
- Source
-
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