SOLICITATION NOTICE
66 -- LOW PRESSURE CHEMICAL VAPOR DEPOSITION SYSTEM FOR DEPOSITION OF SILICON DIOXIDE
- Notice Date
- 8/15/2007
- Notice Type
- Solicitation Notice
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC07214452Q
- Response Due
- 8/29/2007
- Archive Date
- 8/15/2008
- Small Business Set-Aside
- N/A
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation, which is issued as a Request for Quotation (RFQ); quotes are being requested and a written solicitation will not be issued. The Government intends to acquire a commercial item using FAR Part 12 and the Simplified Acquisition Procedures set forth in FAR Part 13. All responsible sources may submit an ofer which shall be considered by the agency. This notice is being issued as a Request for Quotation (RFQ) for a Low Pressure Chemical Vapor Deposition System (LPCVD) for Deposition of Silicon Dioxide. Item No. 1: A single tube LPCVD system for deposition of silicon dioxide films. As a minimum, the LPCBD system shall meet the following specifications: 1.1 Scope: A silicon dioxide LPCVD system is needed to support research at NASA Glenn Research Center on high temperature electronics using silicon carbide (SiC). The LPCVD system will be used for deposition of silicon dioxide as an interlayer dielectric layer in SiC integrated circuits. Silicon dioxide films up to 2 micrometers in thickness must be deposited at temperatures below 750 degrees Celsius. These films must have good adhesion and low mechanical stress, as well as good electrical properties (i.e., high breakdown field and low leakage) at temperatures as high as 500 degrees Celsius. To provide a suitably low deposition temperature the LPCVD system shall use tetra-ethyl-ortho-silicate (TEOS) as a precursor. 1.2 Description: The LPCVD system shall consist of the following principal components: 1. furnace section, consisting of insulated enclosure, heating elements, temperature sensors, vestibule blocks and scavenger box. 2. gas delivery system consisting of gas cabinet, gas supply plumbing, mass flow controllers and TEOS source. 3. automated loader. 4. pressure control and pumping system 5. process control system utilizing a computer. 6. quartzware 1.3 Intended use: 1. The furnace will be used for deposition of silicon dioxide films on SiC wafers with diameters of 2 in, 3 in, and 4 in. The quartzware will later be replaced to enable processing of 6-in diameter wafers. 2. Process temperatures will be in the range from 450 to 1000 degrees Celsius. 3. Typical process load will be 25 wafers in one quartz boat. 2.0 Furnace requirements: 2.1 General 1. The furnace shall be designed for a bulkhead installation. The furnace will be installed in a class 10,000 chase area. The furnace will be loaded from an adjacent class 100 cleanroom. The furnace shall have an automated loader that extends into the class 100 cleanroom area. The automated loader shall be controllable from the class 100 cleanroom area. The deposition process shall be controlled by a computer located in the class 10,000 chase area. Furnace materials and construction shall be cleanroom compatible. As provided, the furnace shall be capable of processing 2 inch, 3 inch and 4 inch wafers, and shall be upgradeable to 6 inch wafers by replacing the process tube, flange, load door and boats. 2. The furnace shall be right hand load (i.e., load from right to left) when facing the furnace from the instrumented (i.e., the front) side. The gas cabinet shall be integrated with the furnace and located on the left side. 3. The furnace will be installed with its back side next to another furnace (or wall). The furnace and gas cabinet shall be fully serviceable without accessing either from the back. 4. Tubes shall be removable from the left side, through the gas cabinet. 5. The TEOS source shall have a separate cabinet that shall have casters to allow it to be readily repositioned as needed to perform maintenance on the entire system. 6. Process temperature shall be from 450 to 1000 degrees Celsius. 7. Process load shall be 25 wafers in one quartz boat. 8. The furnace system shall be water cooled to minimize heat loading to room. 9. Vendor shall submit a floor plan for approval by NASA prior to building the system. 2.2 Furnace section 1. The furnace shall have three independently controlled heating elements. 2. Design of heating elements shall allow processing of 2-in to 6-in diameter wafers, with a flat zone of 10 inches in length. In the flat zone, temperature shall be uniform within +/- 0.5 degrees Celsius, for temperatures greater than 450 degrees Celsius. 3. Type R spike and profile thermocouples shall be used for temperature control and excess temperature interlock. 4. Heat core shall accommodate a quartz tube with a diameter up to 235 mm OD. 5. The same type and grade of wire shall be used throughout the heating element. 6. Heating elements shall have interlocking alumina spacers that encapsulate the wire 360 degrees. 7. The elements shall not contain starch-based insulation. 8. Heating elements shall be low mass to conserve energy on heating up. 9. Soft insulation shall be used for tube collar and source disk to appropriately center the process tube and provide additional insulating compression. 10. The scavenger box shall be installed in a manner to provide a tight seal to prevent leakage of any gases. 2.2 Gas delivery system 1. Process gases shall be introduced to the load end flange through 2 lines: (a) nitrogen backfill/purge/oxygen; (b) heated stainless steel flex tube for TEOS. 2. Pre-plumbing: Each line shall include a 0.5 micrometer in-line pre-filter and a ? turn diaphragm or bellows type isolation valve. 2.2.1 Gas cabinet 1. Shall be integrated with furnace frame. 2. There shall be 3 flow loops: high flow nitrogen, low flow nitrogen, and oxygen. 3. Each flow loop shall include a 1/3 psi check valve at main inlet, 0.03 micrometer point of use filter, mass flow controller (MFC) and pneumatic valve. 4. All plumbing shall be electropolished 316L stainless steel 316L (Ra = 10 or less). Stainless tubing connections shall be made with VCR-type fittings. Orbital welded Microfit or equal fittings shall be used instead of bends. 5. All plumbing shall be assembled in class 100 cleanroom. 2.2.2 TEOS cabinet 1. TEOS cabinet shall be independent from the furnace for ease of maintenance. 2. The TEOS cabinet shall be located near load end flange. 3. The TEOS temperature shall be controlled using a Schumacher ATCS-15 controller or equal designed for TEOS. 4. TEOS cabinet shall include a heated MKS vapor controller or equal with computer controlled valves on inlet and outlet. 5. Nitrogen purge of the vapor controller shall be provided. 6. The TEOS delivery line shall be heated. 2.3 Foreline assembly and pumping system 2.3.1 Foreline assembly 1. The pump foreline shall be heated 3 inch diameter with ISO 80 connections. 2. Shall include heated isolation valve with integral soft start. 3. Shall include heated closed loop pressure control using butterfly throttle valve and controller. 4. Shall include two heated pressure manometers with 1000 torr and 1 torr ranges. 5. Shall include flex bellows and tube adapter. 6. A water cooled cold trap with rotometer control of water flow shall be provided. 7. Foreline length shall be 6 feet. 2.3.2 Pumping system 1. A dry pumping system shall be provided. An OEM factory refurbished pump with full warranty is acceptable. Pump shall be capable of a 6" wafer process. 2. Pumping system shall be designed for LPCVD applications in which corrosive and condensable byproducts and particulates are pumped. 3. Shall have pumping speed of 10,000 liters/min or greater. 4. Shall have ultimate vacuum of 0.07 Pa, or less. 5. Shall have no lubricating or sealing fluid in the pumping chamber. 2.4 Loading system: 1. Shall include stainless steel door with bellows and O-ring. 2. Shall include quartz sheathed alumina rods for loading. 3. Shall be controllable from within class 100 cleanroom. 4. Shall include in/out adjustable limit switches. 5. Shall be belt driven with drive clutch. 6. Shall include potentiometer for position/speed. 7. Shall include indicator lights for in/out complete. 2.5 Process controller 1. Shall have Windows based operator interface. 2. Shall include host computer with monitor, keyboard and mouse. 3. Shall display detailed real time status for each process chamber. 4. Shall be recipe based with recipe editing and storage capability. 5. Shall provide full control of process configuration. 6. Shall provide automatic data capture for all process runs at 1 second intervals. 7. Shall allow user to search and browse complete logs of all system and user events including process alarms. 8. Shall allow user to graph and compare real time data, archived data and recipes. 9. Shall provide control of user access through multiple security levels. 10. Ramp rate of gas flows shall be programmable through the controllers. 11. Shall have the capability of spike and profile thermocouple control. 12. Shall provide temperature autoprofiling. 13. Shall provide auto tuning of the temperature control loop. 14. The control loop update time shall be 1 sec or less. 2.6 Quartzware: Shall be: 1. 225/235 mm domed quartz process tube with foreline connection ball socket and profile thermocouple port. Quantity = 2 (one spare). 2. Quartz 25 slot 50 mm wafer boat. Quantity = 1. 3. Quart 50 mm dummy boat. Quantity = 2. 4. Quartz 25 slot 75 mm wafer boat. Quantity = 1 5. Quartz 75 mm dummy boat. Quantity = 2. 6. Quartz 25 slot 100 mm wafer boat. Quantity = 1. 7. Quartz 100 mm dummy boat. Quantity = 2. 4. Quartz twin rod sheaths for loading. Quantity = 2. 5. Alumina rods for loading. Quantity = 2. 2.7 Electrical 1. Furnace system shall use 240 V or 480 V three-phase power. 2. Electrical power and electronic equipment shall be configured so that there is no need to access the back side of the furnace system. 3. Hardware interlocks that automatically bring the system to a non-operating standby mode shall be interfaced with the equipment's operating system. Interlocks shall be designed to require manual reset and to allow restart only after fault correction. 4. Equipment that is not portable as defined by the NEC shall have a lockable safety disconnect switch supplied as part of the machine. 5. The disconnect switch shall be located in an area away from the scavenger box. 2.8 Environment and Facilities 1. The seller shall supply equipment documents and dimensioned drawings to support all equipment facility requirements. Equipment facility details shall include all required utilities and connection locations, environmental conditions, and operating clearances. 2. The equipment shall be capable of operating satisfactorily in a class 10,000 clean room environment with an ambient temperature of 68 degrees Fahrenheit and a relative humidity of 45%. 2.9 Safety 1. All equipment shall be inspected for personal hazards, including unguarded electrical components with hazardous potentials of energy, high temperatures, sharp corners, unguarded moving parts, pinch points, and excessive noise. 2. The system shall be fully interlocked for equipment, process, and operator protection utilizing EPO per OSHA requirements, power supply interrupts, illogical or unsafe computer command verification, and power supply safety interlocks. EPO switches shall use latching keyed recessed buttons. 3. Any possibility of shock hazard shall be reduced by the incorporation of barriered slide mounted drawer(s) for the mounting and isolation of electrical equipment within the base of the furnace section. Drawer(s) shall be interlocked to each individual furnace chamber to provide chamber shut down when drawer is opened. 4. Redundant excess temperature interlocks shall be provided. 5. Process related safety interlocks shall be provided: a. Door switch interlocked to isolation pump valve. b. Atmosphere switch to interlock door and foreline. c. Pressure switch to interlock gas flow. 3.0 Delivery, Installation Training and Warranty 1. Delivery shall be to NASA Glenn Research Center. Installation shall include system assembly and performance verification. 2. Vendor shall start furnace and qualify the TEOS process. The Contractor shall demonstrate that the system is in accordance with the above specifications and peform a performance verification test to be witnessed by the Government. 3. Vendor shall provide on-site training. Installation checkout and training shall be performed Monday thru Friday, non-government holidays form 8 a.m. to 5 p.m. or per other mutually agreeable times. 4. NASA will supply all wafers for start up and testing. 5. Vendor shall provide one year warranty on all parts and labor from the date of acceptance of system by the Government. 4.0 Process Vendor shall qualify a TEOS silicon dioxide deposition process as a part of the installation. Process shall meet the following requirements: 1. Deposition rate of 150 Angstroms/minute or greater at a deposition temperature of 720 degrees Celsius or less. 2. Thickness uniformity-- across a wafer, across the boat, and from run to run-- shall be +/-3% or less. 5.0 Documentation 1. Vendor shall provide 2 sets of operation and maintenance manuals on CD, which shall include maintenance and calibration instructions, vendor manuals, facility and electrical drawings and a spare parts list. Delivery to NASA Glenn Research Center is required within 180 calendar days After Receipt of Order (ARO) for Item No. 1. Delivery shall be FOB origin. **NOTE TO PROSPECTIVE OFFERORS: OFFEROR MUST INCLUDE ADEQUATE INFORMATION FOR THE GOVERNMENT TO EVALUATE WHETHER OR NOT THE ITEMS MEET THE ABOVE SPECIFICATIONS** The provisions and clauses in the RFQ are those in effect through FAC 05-18. The NAICS Code and the small business size standard for this procurement are 333295 and 500 respectively. The offeror shall state in their offer their size status for this procurement. All contractual and technical questions must be in writing (e-mail or fax)to Michael Kinkelaar not later than August 21, 2007. Telephone questions WILL NOT be accepted. Offers for the item(s) described above are due by August 29, 2007 4:30p.m. GRC local time and may be mailed to NASA Glenn Research Center, 21000 Brookpark Road, MS 500-305, Cleveland, OH 44135, and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), Cage Code, taxpayer identification number (TIN) and other Representations and Certifications (52.212-3), identification of any special commercial terms, description of items offered per FAR 52.212-1-Instructions to Offerors-Commercial Items and as modified, and be signed by an authorized company representative. A copy of a published price list, catalog price or computer page printout showing the price for requested items may also be included if desired. (Note, the Contracting Officer may request this information if only 1 source provides a proposal). Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form. This form may be obtained via the internet at URL: Informed : ftp://ftp.hq.nasa.gov/forms/pdf/sf1449.pdf The DPAS rating for this procurement is DO-C9. Offerors shall provide the information required by FAR 52.212-1 (SEP 2006), Instructions to Offerors-Commercial, which is incorporated by reference. Addenda to FAR 52.212-1 are as follows: None. If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. FAR 52.212-4 (FEB 2007), Contract Terms and Conditions-Commercial Items is applicable. FAR 52.212-5 (JUN 2007)Contract Terms and Conditions Required to Implement Statutes or Executive Orders-- Commercial Items is applicable. As prescribed in 12.301(b)(4), insert the following clauses: 1) 52.233-3, Protest After Award (Aug 1996) (31 U.S.C. 3553). (2) 52.233-4, Applicable Law for Breach of Contract Claim (Oct 2004) (Pub. L. 108-77, 108-78) a) The Contractor shall comply with the following Federal Acquisition Regulation (FAR) clauses, which are incorporated in this contract by reference, to implement provisions of law or Executive orders applicable to acquisitions of commercial items: _x_ 52.203-6, Restrictions on Subcontractor Sales to the Government (Sept 2006), with Alternate I (Oct 1995) (41 U.S.C. 253g and 10 U.S.C. 2402). _X_ 52.219-4 Notice of Price Evaluation Preference for HUBZone Small Business Concerns (July 2005) _X_ 52.219-8 Utilization of Small Business Concerns (May 2004) _X_ 52.219-14, Limitations on Subcontracting (Dec 1996) (15 U.S.C. 637(a)(14)). _X_ (i) 52.219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns (Sept 2005) (10 U.S.C. 2323) (if the offeror elects to waive the adjustment, it shall so indicate in its offer). _X_ 52.222-3, Convict Labor (June 2003) (E.O. 11755). _X_ 52.222-19, Child Labor?Cooperation with Authorities and Remedies (Jan 2006) (E.O. 13126). X__ 52.222-21, Prohibition of Segregated Facilities (Feb 1999). _X_ 52.222-26, Equal Opportunity (Mar 2007) (E.O. 11246). _X_ 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Sept 2006) (38 U.S.C. 4212). _X_ 52.222-36, Affirmative Action for Workers with Disabilities (Jun 1998) (29 U.S.C. 793). X__ ( 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Sept 2006) (38 U.S.C. 4212). _X_ 52.222-39, Notification of Employee Rights Concerning Payment of Union Dues or Fees (Dec 2004) (E.O. 13201). _X_ 52.225-1, Buy American Act?Supplies (June 2003) (41 U.S.C. 10a-10d). _X_ 52.225-13, Restrictions on Certain Foreign Purchases (Feb 2006) (E.o.s, proclamations, and statutes administered by the Office of Foreign Assets Control of the Department of the Treasury). _X_ 52.225-18 Place of Manufacture (Sept 2006) _x_ 52.232-34, Payment by Electronic Funds Transfer?Other than Central Contractor Registration (May 1999) (31 U.S.C. 3332). The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Selection and award will be made to that offeror whose offer meets the specifications above, and is the most advantageous to the Government, with consideration given to the factors of proposed technical merit, price, and past performance. The following Best Value Criteria shall also be considered: 1. Delivery time of less than 180 calendar days after receipt of order. 2. The vendor must show demonstrated performance and delivery of equipment of this type to a government agency, university or industry. Technical acceptability will be determined by information submitted by the offeror providing a description in sufficient detail to show that the product offered meets the Government's requirements (see specifications above). It is critical that offerors provide adequate detail to allow evaluation of their offer, (SEE FAR 52.212-1(b). Unless otherwise stated in the solicitation, for selection purposes, technical mert, total price and past performance are essentially equal in importance. Offerors must include completed copies of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Greater_Than_25K.doc . These representations and certifications will be incorporated by reference in any resultant contract. Prospective offerors shall notify this office of their intent to submit an offer. It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22 . An ombudsman has been appointed - See NASA Specific Note "B". 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