SOLICITATION NOTICE
66 -- Corrosive Turbomolecular Pump with Rotary Vane Backing Pump
- Notice Date
- 7/12/2007
- Notice Type
- Solicitation Notice
- NAICS
- 333911
— Pump and Pumping Equipment Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD, 20899-1640, UNITED STATES
- ZIP Code
- 00000
- Solicitation Number
- SB1341-07-RQ-0298
- Response Due
- 7/27/2007
- Archive Date
- 8/11/2007
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. SIMPLIFIED ACQUISITION PROCEDURES ARE UTILIZED IN THIS PROCUREMENT. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-17. *** The associated North American Industrial Classification System (NAICS) code for this procurement is 333911 with a small business size standard of 500 employees. However this requirement is unrestricted and all interested Contractors may submit a quote. *** ***The National Institute of Standards and Technology (NIST) has a requirement for a Corrosive Turbomolecular Pump with Rotary Vane Backing Pump to be used in the Process Measurements Division at NIST, Gaithersburg, MD. *** Line Item 0001: One (1) Lot, Corrosive Turbomolecular Pump with Rotary Vane Backing Pump BACKGROUND The Process Sensing Group intends to purchase a turbomolecular pump with rotary vane backing pump for an existing chemical vapor deposition (CVD) system that is used to fabricate thin film chemical sensing layers. This pumping package is intended to be mounted on an existing CVD vacuum system. This CVD system produces metal-oxide thin-films by means of thermal decomposition of metal-organic starting materials (or precursors). These metal-organic precursors produce corrosive byproducts, which must be adequately removed by the pumping package. The corrosion problem is exacerbated by the fact that the CVD vacuum system is a ?batch tool.? Batch tools are systems that are vented directly to atmosphere, allowing water (humidity-generated) to enter the deposition chamber during sample/device loading and unloading. Therefore, both the turbomolecular pump and the rotary vane backing pump must be corrosion resistant. The Contractor shall meet or exceed the following minimum technical specifications: The turbomolecular pump is required to achieve a system base pressure of five times ten to the negative eighth Torr. This base pressure level indicates a minimum amount of water in the system. We must minimize the amount of water because water reacts with our precursors, causing excessive variability in the final thin-films produced. The 2-stage rotary vane pump is required for safely pumping away excess CVD precursors and their associated byproducts. The 2-stages are required because the processing pressure is in the 10 to the negative 3rd power Torr range. A single stage pump cannot deliver this level of performance. Listed below are the specific requirements for both the turbomolecular pump and the 2-stage rotary vane pump, as dictated by our CVD process. Turbopump: Pumping Speed/Compression of Semi-Mag/Lev Turbomolecular Pump Hydrogen - 480 L/Sec 5 x 10 to the 6 power Helium - 500 L/Sec 5 x 10 to the 7 power Nitrogen - 500 L/Sec Greater than 10 to the 12 power (These pumping speeds for the listed gases are required to overcome the Conductance of the current CVD system. Also, the higher the compression ratio the better the turbopump can remove water. It is imperative that water be removed because the chemical precursors used to produce the metal-oxide thin-films react with water. If the amount of water varies, so will the resultant thin-film. Having reproducible thin-film products is required for the project.) DN 160 CF-F inlet. (The required flange shall mate with existing CVD system.) Corrosion resistant Ceramic lubricated bearing must be field replaceable by operators' personnel without removing the rotor/stator package. Bearings must be located at the two ends of the rotor with the top bearing being of the magnetic variety. (A magnetic bearing is required in order to minimize cross-contamination when using different metal-organic precursors. Typically, some turbopumps employ two oil bearings. These oil bearings absorb the chemical precursors delivered to the system. These precursors thermally decompose, due to the friction encountered at typical turbo rotor rotational speeds, creating corrosive gases and abrasive particles. The required turbopump will have one inert gas-purged, oil bearing. The purge gas keeps the one oil bearing clean while not adversely affecting the overall pumping efficiency, as would be the case when purging two oil bearings.) Turbopump blades must be designed so the pump can withstand sudden inrush of atmosphere at full rotational speed on the inlet or exhaust. (This is required in case of system breech while under vacuum. Otherwise, the turbopump will be irreparably damaged.) Turbopump must include an integrated molecular drag stage so the pump can exhaust to a pressure of 16mbar, and reach an ultimate pressure less than one times ten to the negative ninth mbar with a diaphragm roughing pump. Pump can operate with an inlet pressure of 0.1mbar continuously. Maximum throughput of 960sccm for N2. (This is required in order to handle CVD precursor delivery as well as expelling the bearing purge gas.) Turbopump must be able to be mounted in horizontal or vertical position. (Due to space limitations, the orientaion position must be flexible.) Programmable, delayed vent valve to vent the turbopump when the rotational speed drops to roughly 50 percent of nominal, or a time delay, as well as being disabled. Venting between the turbopump compression stages above the last rotor stage to eliminate contamination caused by venting into the fore vacuum area. (The foreline must be kept clean to avoid cross-contamination.) Bearing MTBF (Mean Time Before Failure) of less than 100,000 hours. 2-stage Rotary Vane Pump: Must be oxygen and corrosion resistant. (The CVD system to which the rotary vane backing pump is for produces metal-oxide thin-films by means of thermal decomposition of metal-organic starting materials (or precursors). These metal-organic precursors produce corrosive byproducts, which must be adequately removed by the pumping package. The corrosion problem is exacerbated by the fact that the CVD vacuum system is a ?batch tool.? Batch tools are systems that are vented directly to atmosphere, allowing water (humidity-generated) to enter the deposition chamber during sample/device loading and unloading. Therefore, the rotary vane backing pump must be corrosion resistant.) Vacuum safety valve. (Required safety feature in case of power failure.) Magnetic coupling of the drive to the pump. (Required safety feature. There are no drive shaft seals with magnetic coupling. Therefore, oil cannot leak out of the pump. This pump oil will be exposed to CVD precursors, which are toxic.) Pumping speed of 12m3/hr (7cfm) minimum. (Required pumping speed to handle CVD precursor/carrier gas flow.) Use perfluoropolyether lubricant (a.k.a. Krytox 1514/F4 oil). (Required for chemical inertness, hence addressing safety as well as minimizing cross-contamination from back-streaming reaction products into the vacuum deposition system.) ****The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement," 2) Past Performance, 3) Previous Experience, and 4) Price. Technical Capability, Past Performance, and Previous Experience, when combined, are equal to Price. Award shall be made on a best value basis. ****Evaluation of Technical Capability shall be based on the information provided in the quotation. Quotations shall include the make and model of the products, manufacturer sales literature or other product literature, which CLEARLY DOCUMENTS that the offered product(s) meet or exceed the specifications stated above. ****Past Performance will be evaluated to determine the overall quality of the product and service, provided by the Contractor. Evaluation of Past Performance shall be based on the references provided IAW FAR 52.212-1(b)(10) and/ or information provided by NIST or its? affiliates. Quoters shall provide a list of at least three (3) references to whom the same or similar products have been sold. The list of references shall include, at a minimum: The name of the reference contact person and the company or organization; the telephone number of the reference contact person; the contract or grant number; the amount of the contract and the address and the telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed. ***Past Experience shall be evaluated to determine the extent of the Contractor's experience of at least five (5) years in and knowledge in providing similar systems. Evaluation of past experience may be based on contacts used for past performance; however, the vendor should provide additional references relating to its past experience information, if necessary. To allow assessment, each quote must include appropriate documentation. ***Delivery shall be FOB DESTINATION and be completed in accordance with the Contractor?s commercial schedule. *** ***The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all line items to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-0001. *** The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html. The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. The following clauses apply to this acquisition: 52.204-7 Central Contractor Registration; 52.212-4 Contract Terms and Conditions?Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders? Commercial Items including subparagraphs: 52.219-6, Notice of Total Small Business Set-Aside; 52.222-3, Convict Labor; 52.222-19, Child Labor ? Cooperation with Authorities And Remedies; 52.222-21, Prohibition of Segregated Facilities; 52-222-26, Equal Opportunity; 52.222-35, Equal Opportunity for Special Disabled Veterans; 52.222-36, Affirmative Action for Workers with Disabilities; 52.222-37, Employment Reports on Special Disabled Veterans; 52.225-3, Buy American Act - Free Trade Agreements - Israeli Trade Act w/ Alternate I; 52.225-13, Restriction on Certain Foreign Purchases; and 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. ***All vendors shall submit the following: 1) An original and one (1) copy of a quotation which addresses all Line Items; 2) Two (2) Originals of the Technical description and/or product literature; 3) Description of commercial warranty; and 4) One (1) copy of the most recent published price list. This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The Offeror shall state ?The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition.? OR The Offeror shall state ?The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) ***All quotes shall be received not later than 3:30:00 PM local time, on July 27, 2007 at the National Institute of Standards & Technology, Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attn: Jennifer Lohmeier. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be made to the Contracts Office at 301-975-4959. NIST is not responsible for late delivery due to the added security measures. In addition, offerors/quoters who do not provide 24-hour notification in order to coordinate entrance to the NIST campus shall assume the risk of not being able to deliver offers/quotes on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, bldg., room number, etc.). If 24 hour notification was not provided, it is suggested your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitor center and complete delivery. Notice shall include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-US citizens, the following additional information will be required: title, employer/sponsor, and address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility. Faxed quotes will NOT be accepted. Emailed quotes will be accepted. ***
- Place of Performance
- Address: 100 Bureau Drive, Shipping & Receiving, Building 301, Gaithersburg, Maryland
- Zip Code: 20899-0001
- Country: UNITED STATES
- Zip Code: 20899-0001
- Record
- SN01340419-W 20070714/070712220619 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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