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FBO DAILY ISSUE OF MAY 12, 2006 FBO #1628
SOLICITATION NOTICE

66 -- Microwave Plasma Ashing System

Notice Date

5/10/2006
 

Notice Type

Solicitation Notice
 

NAICS

333295 — Semiconductor Machinery Manufacturing
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD, 20899-1640
 

ZIP Code

20899-1640
 

Solicitation Number

SB1341-06-Q-0383
 

Response Due

5/25/2006
 

Archive Date

6/9/2006
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES UNDER THE AUTHORITY OF FAR SUBPART 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-09. *** The associated North American Industrial Classification System (NAICS) code for this procurement is 333295 with a small business size standard of 500 employees. This requirement is 100% set aside for small businesses. Only interested small businesses may submit a quote. In accordance with the Non-Manufacturer Rule, to qualify under a small business set-aside, the distributor and the manufacturer must qualify as a Small Business manufacturer under the NAICS code identified above. *** ***The National Institute of Standards and Technology (NIST) has a requirement for Microwave Plasma Ashing System to be used in the Semiconductor Electronics Division at NIST in Gaithersburg, Maryland. *** Specifications for the Purchase of a Microwave Plasma Ashing System for the CNST Nanofab Background: The CNST Nanofab requires a Microwave Plasma Ashing system to provide damage-free removal of organic materials such as photoresist from the surface of substrates. The current process used in the Nanofab at NIST is to remove the material and residue by hand. This is time consuming and dangerous when using ?Nanostrip?, EKC265, RCA, or other caustic chemicals. The Microwave Plasma Ashing system reduces the chemical use and the associated dangers, while allowing up to 25 wafers to be cleaned in less than 30 minutes. Specifications: The unit must be capable of: o Photoresist Strip (Including difficult implanted and very thick resists such as Microchem SU-8.) o Removal of Polymers such as Polyimide, PMMA, etc. o Photoresist Descum Removal. o Meeting Very Low Temperature Budget removal Requirements. o Metal Lift off Process Improvement. o Wafer Surface Cleaning. o Surface Modification for hydrophobic or hydrophilic and Stiction elimination treatment. o Polyimide, Polymer and Nitride Isotropic Etches. The unit must be capable of handling at least 25, 200mm (8 inch) wafers. The unit must provide a Quartz liner for high purity and long lifetime, and options for a Ceramic liner to provide fluorine resistance to such gases as CF4. (Fluorine attacks quartz and can reduce its lifetime significantly). Must provide a dry vacuum pump package eliminating oil contamination caused by rotary vane type oil pumps. The unit shall provide Microwave power at 2.5 GHz with at least 1000 watts of user selectable range. Must offer a replacement kit for Microwave power supply. Must provide four gas channels for flexibility for the addition of Oxygen and Carbon Tetrafluoride, nitrogen, and other user specific gases. This shall allow for 1 or all gases to be flowed. Must provide automatic end of process termination utilizing optical endpoint detection. The unit must be designed for through-the-wall installation in a class 100 cleanroom. The system shall allow for manual loading of wafers outside of chamber, and within the laminar flow cleanroom area. The unit must be new and not refurbished. Refurbished systems tend to have no traceable history, and may lead to process control problems and or contamination. Must have control software with safety interlocks, protecting the user at all times from accidentally initiating a command in an unsafe condition. The system must come complete ?out of the box?. All stands, pumps, cables, mounting flanges, etc. must be included. Must be clean room packed for class 100. The Vendor must provide tool assembly, installation and training for process and service technicians on site. ***Warranty*** A one (1) year warranty on parts and labor shall be included. ***Acceptance/Inspection*** Must demonstrate surface cleaning ability utilizing photoresist (Shipley 1813) on 25 or more wafers at one time. The surface shall be analyzed by electron microscopy on-site. ***Delivery shall be FOB DESTINATION and be completed in accordance with the Contractor?s commercial schedule. *** ***The contractor shall pack and mark the shipment (Must be clean room packed for class 100) in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all line items to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-0001. *** ****The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement," 2) Past Performance, 3) Previous Experience, and 4) Price. Technical Capability, Past Performance, and Previous Experience, when combined, are more important than Price. Award shall be made based on best value. ****Evaluation of Technical Capability shall be based on the information provided in the quotation. Quotations shall include the make and model of the products, manufacturer sales literature or other product literature, which CLEARLY DOCUMENTS that the offered product(s) meet or exceed the specifications stated above. ****Past Performance will be evaluated to determine the overall quality of the product and service, provided by the Contractor. Evaluation of Past Performance shall be based on the references provided IAW FAR 52.212-1(b)(10) and/ or information provided by NIST or its? affiliates. Quoters shall provide a list of at least three (3) references to whom the same or similar products have been sold. The list of references shall include, at a minimum: The name of the reference contact person and the company or organization; the telephone number of the reference contact person; the contract or grant number; the amount of the contract and the address and the telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed. ****Past Experience will be evaluated to determine the degree of vendors' experience in providing similar Microwave Plasma Ashing Systems. ***The following provisions and clauses apply to this acquisition: Provisions: 52.212-1, Instructions to Offerors-Commercial Items; and 52.212-3 Offeror Representations and Certifications-Commercial Items. ***Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. *** Clauses: 52.204-7, Central Contractor Registration (Oct 2003); 52.212-4 Contract Terms and Conditions?Commercial Items (Sep 2005); 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders?Commercial Items (Jan 2006) including subparagraphs: (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I; (3) 52.219-4 Notice of Price Evaluation Preference for HUB-Zone Small Business concerns; (7) 52.219-8, Utilization of Small Business Concerns; (14) 52.222-3 Convict Labor; (15) 52.222-19 Child Labor ? Cooperation With Authorities And Remedies; (16) 52.222-21, Prohibition of Segregated Facilities; (17) 52.222-26, Equal Opportunity; (18) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (19) 52.222-36, Affirmative Action for Workers with Disabilities; (20) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (21) 52.222-39, Notification of Employee Rights Concerning Payment of Union Dues or Fees (Dec 2004) (E.O. 13201); (24) (i) 52.225-3, Buy American Act?Free Trade Agreements?Israeli Trade Act (Jan 2004); (26) 52.225-13, Restrictions on Certain Foreign Purchases; (31) 52.232-33, Payment by Electronic Funds Transfer ? Central Contractor Registration and Department of Commerce Agency-Level Protest Procedures Level Above the Contracting Officer, which can be downloaded at http://www.nist.gov/admin/od/contract/agency.htm. ****All Parties shall submit the following: 1) Two (2) copies of a quotation which addresses all Line Items; 2) Technical description and/or product literature; 3) Description of commercial warranty; and 4) One (1) copy of the most recent published price list(s). ****All quotes should be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Jennifer Roderick, Building 301, Room B175, 100 Bureau Drive, Stop 1640, Gaithersburg, MD 20899-1640. SECURITY REQUIREMENTS Because of heightened security, FED-EX, UPS or similar delivery methods are the preferred method of delivery of proposals. If proposals are hand delivered, delivery must be made through Gate A, and a 48 hour (excluding weekends and holidays) prior notice must be made to the Contracts Office at 301-975-4959. Notice must include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-US citizens, the following additional information will be required: title, employer/sponsor, and address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility. NIST IS NOT RESPONSIBLE FOR LATE DELIVERY DUE TO THE ADDED SECURITY MEASURES. In addition, Offerors who do not provide a 48-hour notification in order to coordinate entrance to the NIST campus assume the risk of not being able to deliver offers on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, building, room number, etc.) If 48 hour notification was not provided, it is suggested that your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitor?s center and complete delivery. ****Submission must be received by 3:30:00 p.m. local time on May 25, 2006. FAXED QUOTATIONS SHALL NOT BE ACCEPTED. Numbered Notes 1.***
 

Place of Performance

Address: 100 Bureau Drive, Shipping & Receiving, Building 301, Gaithersburg, Maryland

Zip Code: 20899-0001

Country: USA
 

Record

SN01045258-W 20060512/060510220400 (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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