SOLICITATION NOTICE
36 -- PULSED ELECTRON BEAM DEPOSITION UPGRADE
- Notice Date
- 9/13/2004
- Notice Type
- Solicitation Notice
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC04071828Q
- Response Due
- 9/17/2004
- Archive Date
- 9/13/2005
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This notice is being issued as a Request for Quotations (RFQ) for: Item 1, Qty. 1, Pulsed Electron Source Package, Item 2, Qty. 1, Target Carousel Flange Assembly, Item 3, Qty. 1 Pulsed Electron Deposition Automation Package, Item 4, Qty. 1, Installation and Training. The Contractor shall furnish Items 1 through 4 which shall meet the following specifications: An existing Kurt J. Lesker Co. AXXIS thin film deposition system shall be upgraded to provide ablative deposition of thin films utilizing a pulsed electron beam. The upgrade shall include: Item 1. Pulsed electron source with power supply Item 2. Target carousel flange assembly Item 3. Automation package (Windows version) for control of the pulsed electron source and the target carousel. This package shall include a control computer and interface electronics. Item 4. Installation, manuals and training. Companies responding to this request for quotations shall demonstrate their ability to provide the required upgrade by supplying the following: 1. Specification sheets that show the offered equipment meets the requirements listed here. 2. Mechanical drawings that show the offered equipment is physically compatible with the Lesker AXXIS system. 3. A sample of a superconducting film that was deposited using the offered equipment shall be provided. The film shall be yttrium-barium-copper-oxide. The company shall also provide data that demonstrates that this film has a superconducting transition temperature greater than 77 K. Configuration of Deposition System: An existing Kurt J. Lesker Co. AXXIS thin film deposition system shall be upgraded to provide ablative deposition of thin films using a pulsed electron beam. The AXXIS chamber is, essentially, a horizontal cylinder. Six 8? CF ports are arrayed, in a radial pattern, around the cylinder. The axes of these ports intersect each other at the center line of the chamber. For each of these ports, the distance from the flange face to the center line of the chamber is 14?. The axes of these ports are contained by a vertical plane that is designated the six-port plane. Sputter deposition sources are mounted in the upper three ports. The 2? diameter substrate is loaded through a door in the front of the chamber. The substrate is mounted in a substrate holder which is attached to a rotary feedthrough in the door. This feedthrough allows the substrate to be rotated about the center line to face the desired deposition source. Additionally, the chamber includes a port for a pulsed electron source. This is an 8? CF port, located on top of the chamber, towards the rear. This port is aimed forward at 45? to the center line. The axis of this port passes through the center line to a point 5.13? beneath the chamber center line and 0.5? to the rear of the aforementioned six-port plane. The distance from the plane of the flange face to this point is 21?. This point shall correspond to the center of the top surface of the selected target when the target carousel flange assembly is mounted in the bottom port of the six radially arranged ports. The pulsed electron source shall be mounted to an existing z-translator on the pulsed electron source port. The z-translator has 8? CF flanges and a 6? range. Fully retracted, the z-translator has a length of 6? (flange face to flange face). For pulsed electron deposition, the z-translator length will be set at 7.0? +/- 0.5?. Both the pulsed electron source (with the z-translator extended) and the target carousel shall not interfere with rotation of the substrate holder. In the AXXIS chamber, the substrate holder rotates about the center line to allow for deposition from the various sources. For example, the substrate is rotated to face upwards for deposition from a sputter source mounted in the top port. For pulsed electron beam deposition, the substrate will be rotated to face downwards. The center of the surface of the downward facing substrate is 1.13? below the center line of the chamber and 0.5? towards the rear of the six-port plane. When rotated, the substrate holder extends no further than 4.53? from the chamber centerline and no further than 4.125? to the rear of the six-port plane. Description of Items: ITEM 1. Pulsed electron source package. The pulsed electron source package shall have the following characteristics. - 110 VAC, single phase operation - energy of electrons, ~8-20 kV - pulse width of ~100 nanoseconds (ns) - maximum pulse energy of at least 800 mJ - minimum pulse energy of <100 mJ - pulse energy variation, +/- 10% - pulse power density, maximum, >1E+8 W/cm2 - Z-axis alignment, 50 mm - X and Y alignment, +/- 20 mm - operating pressure range, <5 to >20 mTorr - capable of operating with oxygen backfill as well as with inert gases - maximum pulsed electron beam source body temperature, 85 degrees Celsius - flange size, 8.0? CF ITEM 2, Target carousel flange assembly. - the carousel shall index six 1? deposition targets - the carousel shall rotate the selected target during deposition - shall operate on 110 VAC - all rotary feedthroughs shall be magnetic fluid sealed - flange size, 8.0? CF ITEM 3, Pulsed electron deposition automation package. Shall include: - Pentium-based control computer with keyboard, mouse and monitor - plug-in board for control computer - Windows compatible software package preinstalled on computer - interface electronics for computer, servo motor, synchronous motor and laser trigger - positioning of the target selected for deposition - control of speed of rotation of the target selected for deposition - control of pulse rate of the electron beam - control of X, Y and Z axis alignment of electron beam within the range specified in the description of Item 1 ITEM 4, Installation and Training. - install items 1, 2 and 3 in the AXXIS system, located in Bldg 77 at the NASA Glenn Research Center within 2 weeks of delivery. The actual installation and training date shall be via mutual agreement between the Government and Contractor. Installation and training shall be performed Monday-Friday, non-federal holidays, during normal business hours at NASA Glenn Research Center (typically 8 a.m to 5 p.m.) - demonstrate operability of the pulsed electron beam deposition system. - demonstrate non-interference with existing functions of the AXXIS system. - train up to 4 technicians and scientists in the operation of all components of the system. - provide 3 copies of operation and maintenance manuals. The provisions and clauses in the RFQ are those in effect through FAC 01-24. This procurement is a total small business set-aside. See Note 1. The NAICS Code and the small business size standard for this procurement are 333295 and 500 respectively. The offeror shall state in their offer their size status for this procurement. All responsible sources may submit an offer which shall be considered by the agency. Delivery of Items 1, 2, 3 & 4 to the NASA Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135 is required within 12 weeks ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Offers for the items(s) described above are due by September 17, 2004, 4:30 PM Glenn Research Center local time and may be mailed to NASA Glenn Research Center, 21000 Brookpark Road, M. S. 500-306, Cleveland, OH 44135 and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://server-mpo.arc.nasa.gov/Services/NEFS/NEFSHome.tml Offerors shall provide the information required by FAR 52.212-1 (JAN 2004), Instructions to Offerors-Commercial, which is incorporated by reference. If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. FAR 52.212-4 (OCT 2003), Contract Terms and Conditions-Commercial Items is applicable. FAR 52.212-5 (MAY 2004), Contract Terms and Conditions Required To Implement Statutes or Executive Orders-Commercial Items is applicable and the following identified clauses are incorporated by reference: (a) The Contractor shall comply with the following Federal Acquisition Regulation (FAR) clause, which is incorporated in this contract by reference, to implement provisions of law or Executive orders applicable to acquisitions of commercial items: 52.233-3, Protest after Award (Aug 1996) (31 U.S.C. 3553). (b) The Contractor shall comply with the FAR clauses in this paragraph (b) that the Contracting Officer has indicated as being incorporated in this contract by reference to implement provisions of law or Executive orders applicable to acquisitions of commercial items: 52.222-3, Convict Labor (June 2003) (E.O. 11755), 52.222-19, Child Labor-Cooperation with Authorities and Remedies (June 2004) (E.O. 13126),52.222-21, Prohibition of Segregated Facilities (Feb 1999),52.222-26, Equal Opportunity (Apr 2002) (E.O. 11246), 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Dec 2001) (38 U.S.C. 4212),52.222-36, Affirmative Action for Workers with Disabilities (Jun 1998) (29 U.S.C. 793),52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Dec 2001) (38 U.S.C. 4212), 52.225-1, Buy American Act-Supplies (June 2003) (41 U.S.C. 10a-10d), 52.225-15, Sanctioned European Union Country End Products (Feb 2000) (E.O. 12849),52.232-34, Payment by Electronic Funds Transfer-Other than Central Contractor Registration (May 1999) (31 U.S.C. 3332). The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Selection and award will be made on an aggregate basis to the lowest priced, technically acceptable offeror. Technical acceptability will be determined by review of information submitted by the offeror which must provide a description in sufficient detail to show that the product offered meets the Government's requirement. Offerors must include completed copies of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Greater_Than_25K.doc . These representations and certifications will be incorporated by reference in any resultant contract. An ombudsman has been appointed -- See NASA Specific Note "B". Prospective offerors shall notify this office of their intent to submit an offer. It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22 . Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes may be viewed at the following URLs linked below.
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