SOLICITATION NOTICE
66 -- PROFLOMETER
- Notice Date
- 7/28/2004
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC04055078Q
- Response Due
- 8/11/2004
- Archive Date
- 7/28/2005
- Point of Contact
- Jean M. Boylan, Purchasing Agent, Phone (216) 433-2140, Fax (216) 433-2480, Email Jean.M.Boylan@nasa.gov
- E-Mail Address
-
Email your questions to Jean M. Boylan
(Jean.M.Boylan@nasa.gov)
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will NOT be issued. This notice is being issued as a Request for Quotations (RFQ)] for: Stylus Surface Profiler (Quantity required - One each) DESCRIPTION: a stylus type surface profiler intended to measure steps in semiconductor wafers ranging from 50 angstroms to 200 microns. The system is also intended to characterize stress in the wafer by measuring the curvature of the wafer. The general requirements are as follows: The scanning function shall be performed in a linear motion 2.) The maximum scan length shall be > 25 mm 3.) The system shall include a color video camera 4.) The system shall include high aspect ratio stylus of varying tip diameters (4 @ 12.5 micron and 1 @ 0.2 micron specifically) 5.) The system shall include a capability to rapidly change the scan stylus (< 5 minutes) 6.) The system shall include software to perform stress analysis 7.) The control system shall be PC based 8.) The instrument shall have the following minimum vertical resolutions: a. 1 angstrom at 6.5 micron b. 10 angstrom at 60 micron c. 40 angstrom at 150 micron 9.) The instrument shall have a step height repeatability of < 8 angstroms 10.) The instrument shall utilize an optical reference flat to establish the measurement baseline 11.) The system shall have a 150mm diameter stage for mounting the sample 12.) The system shall have a programmable stylus force ranging from 1 to 15 mg The provisions and clauses in the RFQ are those in effect through FAC 01-24. The NAICS Code and the small business size standard for this procurement are 334516 and 500 employees respectively. The offeror shall state in their offer their size status for this procurement. All responsible sources may submit an offer which shall be considered by the agency. The DPAS rating for this procurement is DO-C9. Offers for the items(s) described above are due by Noon on 08/11/04 to Fax # 216-433-2480 and must include, solicitation number, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Offerors are encouraged to use the Standard Form 1449, solicitation/Contract/Order for Commercial Items form found at URL: http://server-mpo.arc.nasa.gov/Services/NEFS/NEFSHome.tml If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm All contractual and technical questions must be in writing (e-mail or fax) to Jean M. Boylan @ 216-433-2480 not later than 08/04/04. Telephone questions WILL NOT be accepted. Selection and award will be made to that offeror whose offer will be most advantageous to the Government, with consideration given to the factors of proposed technical merit, price, and past performance. It is critical that offerors provide adequate detail to allow evaluation of their offer. (SEE FAR 52.212-1(b)). Offerors must include completed copies of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Greater_Than_25K.doc. These representations and certifications will be incorporated by reference in any resultant contract. An ombudsman has been appointed -- See NASA Specific Note "B". It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22 . Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes may be viewed at the following URLs linked below.
- Web Link
-
Click here for the latest information about this notice
(http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22#111585)
- Record
- SN00632443-W 20040730/040728212934 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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