SOLICITATION NOTICE
66 -- Probe Station
- Notice Date
- 5/17/2004
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
- ZIP Code
- 20899-3571
- Solicitation Number
- Reference-Number-04-182-6085
- Response Due
- 6/2/2004
- Archive Date
- 6/3/2004
- Point of Contact
- Jo-Lynn Davis, Contract Specialist, Phone 301-975-6337, Fax 301-975-6319,
- E-Mail Address
-
jo-lynn.davis@nist.gov
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THIS SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Regulation (FAR), Federal Acquisition Circular 2001-23*** The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This acquisition is unrestricted and all interested offerors may submit a quote. The National Institute of Standards and Technology (NIST) has a requirement for one (1) Cascade Microtech model SUMMIT 11861B-HT System or equivalent. The technical work being performed at NIST requires a probe station with extremely low noise and leakage current through the back of the chuck. This low leakage current must also be maintained at high chuck temperatures. There are also measurements that require a high degree of repeatability for capacitance measurements. The Cascade system incorporates a patented chuck that exhibits a variation of less than three (3) fempto farads when the position is changed.** All interested offerors shall provide a quote for the following sytem: Line Item 0001 Summit System consisting of: 1) Prober shall have a 8" x 8" manual stage with manual x,y, and theta controls . 2) Chuck shall rotate +/- 7 degrees 3) Chuck shall be 8" diameter. A roll-out stage to the lock-out specification: "Chuck Roll-out Stage: The 8"thermal chuck shall be equipped with a roll-out stage which extends and locks fully beyond the platen and MicroChamber for unobstructed loading/unloading of wafers and auxiliary chuck accessories." 4) Prober shall be supplied with large area bridge mount that moves the microscope in a 6" y by 8" X format vertical manual lift. 5) Microscope shall be high power multi turreted type. Acceptable types are Mitutoyo VMS-70 or Seiwa VMS 888 with 2x, 10x and 20X objectives and 10x eyepcs with video adapter. 6) Chuck shall be thermal unit capable of a -0 C range to 300 C. Chuck shall be round. Plating shall be Nickel plated. Flatness: 2 mills to 200 C. Residual capacitance: Chuck to Shield <50 picofarads. Chuck shall have 3 vacuum zones of increasing size to handle 4", 6" and 8" wafers. Isolation from chuck to shield shall be greater than 1 Teraohm at 500 volts DC at 25 C. Unit shall have auxiliary thermally isolation chucks. Each Auxiliary chuck shall have independent vacuum control. Auxiliary chucks should be capable of holding contact substrates and calibration substrates while a 8" wafer is on main thermal chuck. The Probe station with thermal system on and thermal system ramping between 0 and 300 C, probe leakage as measured with a HP4156 with one probe on top of a device and the other terminal connected to the chuck, probe + chuck leakage shall not exceed 50 fa on medium integration. Chuck residual capacitance shall be 50 pf and a capacitance variation shall be under 30 ff. Capacitance variation is define as a measurement taking place in a constant humidity environment where the measurement never varies by more than 30 ff due to chuck position. System is optimized for fast settling times and low current measurement capability needed to detect failure mechanisms for the type of research being done. 7) All controls to move stage and positioners shall be located outside of microchamber or environmental enclosure in such a way that there is free access to control knobs without having to lift any enclosures, lids or doors. A chamber must be designed so the operator's body electric field does not effect the measurement. This is often done with a microchamber. Measurement repeatability is key to NIST efforts. 8) Chuck shall be capable of being housed in a Faraday cage or Microchamber that will provide a light tight, EMI shielded, controlled environment box. A nitrogen or dry compressed air inlet shall be supplied to rear of the microchamber. Cold Purge Time: 15 Minutes in chamber with either nitrogen or dry compressed air (-70 C dew point) at 8 SCFM. 9) Prober shall be capable of using customer owned positioners which are Cascade Part Number DCM208VL, DCM208VR with Dual Triax Adapter 114-818 and DCP HTR which all connect together. 10) Chuck shall be capable of being used with Nist Designed thermal control system. 11) Prober shall have a 360 degree platen capable of accepting 4 RF positioners or 8 DC positioners with dual triax adapters. Platen shall have a 2 mill deflection or less for a 10 lb lateral or vertical force and be nickel plated steel or equivalent material. 12) Z Lift Range of Platen: 0.22 inches, repeatable to within 3 microns. 13) Prober shall have a control to raise platen. The control should be capable of accepting a micrometer. 14) Thermal Loop for chuck shall be integrated with cable management system. 15) Dust Cover shall be included . 16) Prober must be compatible with Cascade RF Positioners 114-746 and 114-845.2. The specifications for these existing positioners are as follows: Bolt down sliding positioners shall be included. This is required on one positioner. Brackets shall be supplied to hold the HP4291 head. Positioners shall have micrometers on x, y, z axis along with micrometer Planarization control. Each Positioner must also have holes to mount bias T's or brackets to hold noise measurement/ load pull system. Positioners must have cable clamps to hold rf cables. Each positioner must have a mount to hold 1 hole, 2 hole, 3 hole mount and have holes in the correction location to mount a 2 hole positioner on center. Positioners shall have a minimum travel of .5" travel in X and Y locations and .46"z. Resolution shall be 25 mils per turn or finer. Planarization shall be +/- 5 degrees with micrometer on each arm. 17) Prober shall have HP 4156 safety interlock. The interlock would prevent the HP4156 from sending out a high voltage if access door to probing chamber is opened. 18) Prober shall be supplied with a dull soft gold contact substrate for probe planarization adjustment. 19) Allen Wrench set shall be supplied for all critical Allen screws. 20) Manuals shall be supplied for performing RF measurements with prober. 21) Prober must be capable of accepting microchambered or faraday cage probe card holder. Unit does hot have to be supplied but should be catalog item. 22) Warranty : (minimum) 1 year parts and labor. 23) An applications note shall be supplied showing how the prober, probes and HP 4156 are interfaced. A name of customer for reference should be included who has used the prober with HP instrument. ***Delivery - FOB Destination. The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.***Award will be made to the offeror whose quote offers the lowest price, technically acceptable offer.***The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; and 52.212-3 Offeror Representations and Certifications-Commercial Items.***The following clauses apply to this acquisition: 52.212-4 Contract Terms and Conditions?Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders?Commercial Items including subparagraphs: (13) 52.222-3 Convict Labor; (14) 52.222-19 Child Labor ? Cooperation with Authorities and Remedies; (15) 52.222-21, Prohibition of Segregated Facilities; (16) 52.222-26, Equal Opportunity; (17) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.SC. 4212); (18) 52.222-36, Affirmative Action for Workers with Disabilities; (19) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.S.C. 4212); (21) 52.225-1, Buy American Act ? Supplies (22) 52.225-3, Buy American Act ? North American Free Trade Agreement ? Israeli Trade Act Alt II (24) 52.225-13 Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129 (25) 52.225-15, Sanctioned European Union Country End Products; and (29) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration.*** Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm.***All offerors shall submit the following: 1) A quotation which addresses all Line Items; 2) Description of commercial warranty; 3) A copy of the most recent (relevant portions) of published price list(s); and 4) A completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Items, and 52.225-6 Trade Agreements Certificate, which may be downloaded at www.acqnet.gov 5) Required information from ?applications note? (number 23 in the specifications above) 6) Other relevant information, such as GSA schedule number, if applicable, estimated delivery date, ARO, etc.***All offers should be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Jo-Lynn Davis, Building 301, Room B129, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571. Offerors shall ensure the RFQ number is visible on the outermost packaging.***Submission shall be received by 3:00 p.m. local time on June 2, 2004.***FAXED QUOTES WILL BE ACCEPTED at 301-975-6319 ATTN: JO-LYNN DAVIS, HOWEVER, THEY MUST BE COMPLETE AND INCLUDE ALL REQUIRED INFORMATION.
- Place of Performance
- Address: Contractor's site
- Record
- SN00586954-W 20040519/040517211738 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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