SOLICITATION NOTICE
59 -- Jet Vapor Tool Deposition Tool
- Notice Date
- 5/12/2004
- Notice Type
- Solicitation Notice
- NAICS
- 334413
— Semiconductor and Related Device Manufacturing
- Contracting Office
- US Army Robert Morris Acquisition Center, Adelphi Contracting Division, ATTN: AMSSB-ACA, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX-04-T-0090
- Response Due
- 5/19/2004
- Archive Date
- 7/18/2004
- Point of Contact
- Kathy Harrigan, 301-394-3693
- E-Mail Address
-
Email your questions to US Army Robert Morris Acquisition Center, Adelphi Contracting Division
(kharrigan@arl.army.mil)
- Small Business Set-Aside
- N/A
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) The solicitation number is W911QX-04-T-0090. This acquisition is issued as an RFQ.(iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 01-23. (iv) The associated NAICS code is 334413. The small business size standard is 500.(v)The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if ap plicable): CLIN NO.0001 Description - Jet Vapor Deposition Tool Quantity-1 each (vi) Description of requirements: Overview: One of the critical areas in utilizing semiconductor devices is the packaging that allows semiconductor devices to connect to the outside world as well as insulating plates that have patterned metals applied to it. Newly packaged systems that are developed for high power and high temperature electronics require a tool that bridges the gap between pattern control of the systems used to deposit on the integrated circuits and the thick metal application used to cre ate current packages. A method that applies very thick material using a standard evaporation system with a jet of gas flowing over it that allows very high deposition rates and standard photo patterning used for Integrated Circuit manufacture is the basis for this effort. 2.0 Requirements and Specifications: The contractor shall provide a Jet Vapor Deposition system that meets the following requirements: The system shall process a single 6 inch wafer at a time. The system shall have two wire feed jet sour ces. Each source shall have an ion etch capability. The system shall have computer controlled motion of the wafer and source to allow accurate deposition of the material. The system shall have pumping capacity to maintain 1 torr in the chamber during oper ation. The system shall provide gas control of argon and helium and method for venting the system. The system shall provide oil mist filtering of the pump exhaust. The system shall include a gas delivery system to provide a method to maintain the pressure in the system. The gas delivery system shall use stainless steel components. The chamber shall include two 4 inch conflat flanges on the top for jet source mounting. The chamber shall include two 4 inch conflat flanges on the side to provide a view port an d an upgrade path. The chamber shall include a vacuum pump located either on the bottom or side of the chamber. The system shall provide a single power supply to operate the jet sources. The system shall provide a method to rotate the wafer and move the je t source. The system shall demonstrate 5% or better thickness variation across the 6 inch wafer. The system shall demonstrate 3% or better thickness control across a 2 inch wafer. After contract award, the contractor shall provide a list of facility requ irements within 30 days of award so that the facility can be prepared by the Government for installation the system. The contractor shall deliver the profiling system to US Army Research Laboratory, 2800 Powder Mill Road, Adelphi MD. The contractor will state on all cartons, on all sides of the cartons in 3 inch black capital letters DO NOT OPEN, CALL TECHNICAL POC . The contractor shall install the profiling system in the facility and shall demonstrate full conformance to the requirements in accordance with this Statement of Work. The contractor shall provide evidence that the system??????s software is current at the time of equipment installation. Documentation: The contractor shall provide two (2) complete sets of the operator and maintenance manuals. (vii) Delivery is required by 150 days after award. Delivery shall be made to Army Research Laboratory, ATTN: Shipping and Receiving, 2800 Powder Mill Road, Adelphi, Md 20783-1197. Acceptance shall be performed at Army Research Laboratory, Zahl Building, 2800 Powder Mill Road, Adelphi, Md 20783-1197. The FOB point is desti nation. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: None. (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicabl e to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: The technical capability will be a determination as to whether the proposed product meets the technical specifications required abo ve based on the information furnished by the vendor quote. The Government is not responsible for allocating or securing any information which is not identified in the proposal. If the vendor proposes to modify a product so as to make it conform to the re quirement of this solicitation, the vendor shall include a clear description of such proposed modification and clearly mark any descriptive materials to show modifications. The Government will award a contact to the offeror whose offer is determined to be best value to the Government, with technical factors meeting or exceeding the requirement considered of paramount importance and price factors being of secondary importance. The Government reserves the right to make an award without discussions. (x) Offe rors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARS 252.212-7000, Offeror Representations and Certifications -Commercial Items, with its offer. (xi) The clause at 5 2.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: None (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Or ders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clause s cited in this clause are applicable: FAR 52.203-6, FAR 52.222-3, FAR 52.222-19, FAR 52.222-21, FAR 52.222-26,FAR 52.222-35, FAR 52.222-36, FAR 52.225-1, FAR 52.232-33, FAR 52.232-34, FAR 52.232-6. (xiii) The following additional contract requirement(s) or terms and conditions apply: DFARS 252.212-7001, the following DFARS clauses cited in the clause are applicable: DFARS 252.225-7001, DFARS 252.225-7012, DFARS_252.225-7014, DFARS 252.225-7015, DFARS 252.227-7037. Clauses and provisions are incorporate b y reference and apply to this acquisition. Clauses and provisions can be obtained at http://www.arnet. (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as DOC9E. (xv)The following notes apply to this announcement:Number Note 22. The proposed contract action is for supplies or services for which the Government is sol iciting and negotiating with only one source under the authority of FAR 6.302. The name of the company the Government intends to award a contract to is Jet Process Corporation, 57 Dodge Avenue, North Haven, CT 06473-1191. This notice of intent is not a req uest for competitive proposals. However, the Government will consider all proposals received prior to the closing date and time of this solicitation. (xvi)Offers are due on 5/21/04 by 24:00 hours, at US Army Research Laboratory. RMAC-Adelphi, AMSRD-ACC-AC , 2800 Powder Mill Road, Adelphi, MD 20783-1197 or via email to kharrigan@arl.army.mil (xvii) For information regarding this solicitation, please contact Kathy Harrigan, Contract Specialist at (301) 394.3693 or email kharrigan@arl.army.mil.
- Place of Performance
- Address: US Army Robert Morris Acquisition Center, Adelphi Contracting Division ATTN: AMSRD-ACC-AC, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Country: US
- Zip Code: 20783-1197
- Record
- SN00584734-W 20040514/040512212247 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
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