Loren Data's SAM Daily™

FBO DAILY ISSUE OF MAY 05, 2004 FBO #0891
SOLICITATION NOTICE

66 -- 193nm Attenuated Phase Shifting Photomask

Notice Date

5/3/2004
 

Notice Type

Solicitation Notice
 

NAICS

333319 — Other Commercial and Service Industry Machinery Manufacturing
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

SB1341-04-Q-0481
 

Response Due

5/12/2004
 

Archive Date

5/27/2004
 

Point of Contact

Joni Laster, Purchasing Agent, Phone 301-975-8397, Fax 301-975-8884, - Carol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884,
 

E-Mail Address

joni.laster@nist.gov, carol.wood@nist.gov
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2001-21.****** The associated North American Industrial Classification System (NAICS) code for this procurement is 334119 with a small business size standard of 500 employees. However, this requirement is unrestricted and all interested Contractors may submit a quotation.****** The National Institute of Standards and Technology has a requirement for a state-of-the-art, 193 nm phase shifting photomask, which shall be designed to allow for dimensional metrology with all possible measurement techniques and can serve as test artifact for metrology of photomasks needed by the semiconductor industry.******All interested quoters shall provide a quote for the following: Line Item 0001: One (1) 193nm Attenuated Phase Shifting Photomask meeting or exceeding the following minimum required specifications: (1) Product type: 6 inch x 6 inch x 250 mil, Quartz 0.5 um Flat, 193 Attenuated PSM, 4X; (2) Material: 6 inch x 6 inch x 0.25 inch thick Quartz coated with anti-reflecting chrome; (3) Address size: greater than 0.00125 um, (4) Critical Dimension Size: 300 nm dark line; (5) Minimum feature: 100 nm features on mask; (6) Critical Dimension Tolerance: +/- 0.030 um (mean to target); (7) Critical Dimension Uniformity: 0.030 um (range); (8) CD Images: Yes; (9) Number of Critical Dimension measurements: less than 300 ; (10) Etched quartz phase/tolerance: 180 +/- 3 degrees; (11) Registration: +/- 0.050 um; (12) Defect criterion: Visual inspection for gross defects and (13) Address: 0.004 um ******The Contractor shall state the warranty coverage provided for the Photomask ******Delivery shall be provided no later than 120 days after receipt of an order and shall be FOB Destination. FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver line item 0001 to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-0001. ******Award shall be made to the quoter whose quote offers the best value to the Government. Technical, Past Performance, Past Experience and Price will be considered. The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirements," 2) Past Performance, 3) Past Experience and 4) Price. Technical capability, past performance, and past experience combined shall be more important than price. Quoters shall include product literature, which addresses all specifications and clearly documents that the product offered meets or exceeds the specifications identified herein. Evaluation of Technical Capability will be based on the information provided in the quotation. Past Performance will be evaluated to determine the overall quality of the product and service provided by the Contractor. Past Experience will be evaluated to determine the degree of vendors? experience in successfully providing comparable masks made for the production of state-of-the-art large-scale integrated circuits. Information on Past Experience may be obtained from references.*** ***The following provisions and clauses apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; and 52.212-3 Offeror Representations and Certifications-Commercial Items. 52.212-4 Contract Terms and Conditions?Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders?Commercial Items including subparagraphs: (13) 52.222-3, Convict Labor; (14) 52.222-19 Child Labor ? Cooperation With Authorities And Remedies; (15) 52.222-21, Prohibition of Segregated Facilities; (16) 52-222-26, Equal Opportunity; (18) 52.222-36, Affirmative Action for Workers with Disabilities; (21) 52.225-1 Buy American Act ?Supplies; (24) 52.225-13 Restriction on Certain Foreign Purchases and (30) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. ******All quoters shall submit the following: 1) An original and one (1) copy of a quotation which addresses Line Item 0001; 2) Two (2) copies of technical description and/or product literature; 3) Description of commercial warranty; 4) Two (2) copies of the most recent published price list(s); 5) For the purpose of evaluating Past Performance, provide a list of three (3) contracts/purchase orders completed during the past three years for similar requirements with the following information: Name of contracting activity, contract number, contract type, total contract value, contracting office and telephone number, and program manager and telephone number; and 6) A completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Items which may be downloaded at www.arnet.gov/far.******All quotes shall be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Joni L. Laster, Building 301, Room B129, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571. ******Submission shall be received by 3:00 p.m. EST on May 12, 2004. Any questions or concerns regarding this solicitation should be forwarded in writing via e-mail to the Purchasing Agent (Joni Laster) @ joni.laster@nist.gov. FAXED QUOTES WILL NOT BE ACCEPTED. ******
 

Place of Performance

Address: 100 Bureau Drive,, Gaithersburg, Maryland

Zip Code: 20899

Country: USA
 

Record

SN00578662-W 20040505/040503211727 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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