Loren Data's SAM Daily™

FBO DAILY ISSUE OF AUGUST 28, 2003 FBO #0637
SOLICITATION NOTICE

66 -- Plasma Etcher System

Notice Date

8/26/2003
 

Notice Type

Solicitation Notice
 

Contracting Office

US Army Robert Morris Acquisition Center, Adelphi Contracting Division, ATTN: AMSSB-ACA, 2800 Powder Mill Road, Adelphi, MD 20783-1197
 

ZIP Code

20783-1197
 

Solicitation Number

DAAD1703R0037
 

Response Due

9/16/2003
 

Archive Date

11/15/2003
 

Point of Contact

Robert Tomko, 301-394-3691
 

E-Mail Address

Email your questions to US Army Robert Morris Acquisition Center, Adelphi Contracting Division
(rtomko@arl.army.mil)
 

Small Business Set-Aside

N/A
 

Description

NA The US Army Research Laboratory intends to solicit on a competitive Brand Name or Equal basis for the purchase of a Unaxis USA, Inc. Versaline model inductively coupled plasma (ICP) basic III-V and II-VI compound semiconductor etch system for 2, 3, 4 and 6 inch wafers. This system, will include a transport module, a process module, a control module and a cassette module. This system has both 13.56 MHz and 2 MHz rf generators, all plasma wetted surfaces temperature controlled (ambient to 180 degrees Centigr ade) and etch processes for InP. Initial acceptance, traning, documentation, performance specifications, installation, process set-up assistance and final acceptance testing are in accordance with the Statement of Work to be included in the Request For P roposals. This procurement is being conducted under the Simplified Acquisition Procedures in accordance with FAR 12.203. The solicitation will be posted to the Army Single Face to Industry (ASFI) website at http://www.fedbizopps.gov. Interested persons may identify their interest and capability to respond to the requirement or submit a proposal. No telephone requests will be honored.
 

Place of Performance

Address: US Army Robert Morris Acquisition Center, Adelphi Contracting Division ATTN: AMSSB-ACA, 2800 Powder Mill Road Adelphi MD

Zip Code: 20783-1197

Country: US
 

Record

SN00412808-W 20030828/030827074726 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

---

| FSG Index  |  This Issue's Index  |  Today's FBO Daily Index Page |