SOLICITATION NOTICE
66 -- Three Plasma Processing System
- Notice Date
- 8/9/2003
- Notice Type
- Solicitation Notice
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
- ZIP Code
- 20899-3571
- Solicitation Number
- Reference-Number-03-812-1250
- Response Due
- 8/28/2003
- Archive Date
- 9/12/2003
- Point of Contact
- Jo-Lynn Davis, Contract Specialist, Phone 301-975-6337, Fax 301-975-6319, - Jo-Lynn Davis, Contract Specialist, Phone 301-975-6337, Fax 301-975-6319,
- E-Mail Address
-
jo-lynn.davis@nist.gov, jo-lynn.davis@nist.gov
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Regulation (FAR), Federal Acquisition Circular 2001-14. *** The associated North American Industrial Classification System (NAICS) code for this procurement is 333295 with a small business size standard of 500 employees. This acquisition is unrestricted and all interested offerors may submit a quote. ***The National Institute of Standards and Technology (NIST) has a requirement for a three plasma processing system, for use in the NIST Advanced Measurement Laboratory, Nanofabrication Facility to perform anisotropic etching of metals and Silicon, for the fabrication of Nanostructures and devices, in areas such as MEMS, CMOS, Molecular Electronics, Single Electron devices, Magnetics, Polymers, Ceramics, and others. *** All products must comply with the National Fire Protection Association Code 318 Standard for the Protection of Semiconductor Fabrication Facilities. All equipment must be manufactured in a Class 1000 or higher manufacturing environment. Final assembly and packing/sealing must be done in a certified Class 100 environment, and offeror must ensure proper packaging and shipping. Products must be able to interface with the following existing Unaxis equipment: 790RIE and 790 PECVD which use Total PC control with Control Works operating software. All equipment shall be new and not refurbished. Delivery, installation, start-up, and training shall also be included. ***All interested offerors shall provide a quote for the following items. Specifications for all line items are stated in the attachment located at http://www.fedbizopps.gov/ under reference number 03-812-1250. LINE ITEM 0001: Quantity 1 Deep Silicon Etcher (Bosch Process) LINE ITEM 0002: Quantity 1 Metal Etch Inductively Coupled Dry Plasma Etching System LINE ITEM 0003: Quantity 1 Metal Etch Reactive Ion Etching ***Delivery shall be FOB Destination. The contractor shall pack (in accordance with requirements in the specifications) and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. ***Award shall be made to the offeror whose quote represents the best value to the Government, technical, price, and other factors considered. Quotations will be evaluated based on the following in descending order of importance: Technical Capability; Contractor Field Support Services and Resources; Past Performance; and Prior Experience when combined, are substantially more important than price. The Government will evaluate information based on the following evaluation criteria: 1)Technical Capability, meeting or exceeding the requirement; 2)Contractor Field Support Services and Corporate Resources, the contractor must have customer support field service engineers, all or most of which are U.S. Citizens who have or capable of obtaining appropriate security clearances, to ensure timely warranty and/or post warranty system repairs; replacement components (availability of spare parts) within 24 hours or next day shipped; certified training consisting of basic system set-up, operation, and safe shutdown. This training shall be provided to NIST and offered during system initial acceptance testing at seller?s factory prior to shipment, and again after Final Acceptance Testing at NIST for users and staff; and 24x7 technical support. 3)Past Performance; 4)Prior Experience; and 5)Price ***Evaluation of Technical Capability shall be based on the information provided in the quotation. Offerors shall include the manufacturer, make and model of the product, manufacturer sales literature or other product literature which CLEARLY DOCUMENTS that the offered product meets or exceeds the specifications stated in the attachment. *** Contractor Field Support Services and Corporate Resources, the contractor must have customer support field service engineers, all or most of which are U.S. Citizens who have or capable of obtaining appropriate security clearances, to ensure timely warranty and/or post warranty system repairs; replacement components (availability of spare parts) within 24 hours or next day shipped; certified training consisting of basic system set-up, operation, and safe shutdown. This training shall be provided to NIST and offered during system initial acceptance testing at seller?s factory prior to shipment, and again after Final Acceptance Testing at NIST for users and staff; and 24x7 technical support. The Contractor must have adequate facilities and certifications of such. ***Past Performance will be evaluated to determine the overall quality of the product and service provided. Evaluation of Past Performance will be based on the references provided IAW FAR 52.212-1(b)(10) Offerors shall provide a list of at least 4 references to whom the same or similar equipment has been provided. The list of references shall include, at a minimum: the name of the company or organization and the contact person; telephone number of the contact person; contract or grant number; dollar amount of the contract; address and telephone number of the Contracting Official, if applicable; and the date of delivery or the date services were completed. *** Prior Experience will be evaluated to determine the degree of the offeror?s experience in providing, installing, and servicing comparable plasma etching systems for the types of applications described herein. Prior experience shall be evaluated based on information provided in the quotation and/or through information obtained by references. NOTE: For the evaluation of Past Performance and Prior Experience the Government is not required to contact all references provided by the Offeror. Also, references other than those identified by the Quoter may be contacted by the Government to obtain additional information that will be used in the evaluation of the offeror?s past performance and prior experience. Information for the evaluation of past performance and prior experience will be randomly requested from the list of references or other sources previously stated. Performance and experience information may also be used in making a determination of responsibility. Offerors may not be given another opportunity to address problems encountered in past performance. ***All specifications shall be successfully demonstrated before final acceptance and final payment by the Government. Warranty shall commence upon final acceptance by the Government. ***The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; and 52.212-3 Offeror Representations and Certifications-Commercial Items. ***The following clauses apply to this acquisition: 52.212-4 Contract Terms and Conditions?Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders?Commercial Items including subparagraphs: (1) 52.219-3, Restrictions on Subcontractor Sales to the Government, Alt I; (7) 52.219-8, Utilization of Small Business Concerns; (8) 52.219-9, Small Business Subcontracting Plan (13) 52.222-3, Convict Labor; (14) 52.222-19, Child Labor ? Cooperation with Authorities and Remedies; (15) 52.222-21, Prohibition of Segregated Facilities; (16) 52.222-26, Equal Opportunity; (17) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.SC. 4212); (18) 52.222-36, Affirmative Action for Workers with Disabilities; (19) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.S.C. 4212);(23) 52.225-5, Trade Agreements (24) 52.225-13, Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129; and (30) 52.232-33, Payment by Electronic Funds Transfer-Other Than Central Contractor Registration. ***SMALL BUSINESS SUBCONTRACTING PLAN: In accordance with FAR Subpart 19.5 The Small Business Subcontracting Program, if subcontracting opportunities exist, Offerors classified as Large Business under NAICS Code 333295, shall be required to submit a Small Business Subcontracting Plan in accordance with the format in Attachment II, U.S. DEPARTMENT OF COMMERCE, SMALL, SMALL DISADVANTAGED AND WOMEN OWNED SMALL BUSINESS MODEL SUBCONTRACTING PLAN OUTLINE. A SMALL BUSINESS SUBCONTRACTING PLAN, IN ACCORDANCE WITH THE FORMAT IN ATTACHMENT II, MUST BE SUBMITTED WITH THE QUOTATION. *** Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. All offerors shall submit ALL of the following: 1)An original and two (2) copies of a quotation which addresses all items; 2)Technical description and/or descriptive product literature 3)Description of commercial warranty; 4)Two (2) copies of the most recent (relevant portions) of published price list(s); and 5)A completed copy of the following provisions: 52.204-6 Data Universal Numbering System (DUNS) Number; 52.212-3, and Offeror Representations and Certifications-Commercial Items which may be downloaded at www.acqnet.gov; 6) NFPA 318 and Clean Room Certifications. 7) For Large Business ? A Small Business Subcontracting Plan in accordance with the format identified in Attachment II. All offers should be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Jo-Lynn Davis, Building 301, Room B129, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571. Offerors shall ensure the RFQ number is visible on the outermost packaging.***Submission must be received by 3:00 p.m. local time on August 28, 2003.***FAXED AND/OR EMAIL QUOTES WILL NOT BE ACCEPTED. *** SECURITY REQUIREMENTS: Because of heightened security, FED-EX, UPS or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery must be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice must be made to the Contracts Office at 301-975-6337. Notice must include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-US citizens, the following additional information will be required: title, employer/sponsor, address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility. NIST IS NOT RESPONSIBLE FOR LATE DELIVERY DUE TO THE ADDED SECURITY MEASURES. In addition, Offerors who do not provide a 48 hour notification in order to coordinate entrance to the NIST campus assume the risk of not being able to deliver quotes on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, building, room number, etc.) If 48 hour notification was not provided, it is suggested that your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitors center and complete delivery.
- Place of Performance
- Address: Gaithersburg, MD
- Zip Code: 20899
- Country: USA
- Zip Code: 20899
- Record
- SN00396850-W 20030811/030809213105 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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