SOLICITATION NOTICE
66 -- Variable Angle Spectroscopic Ellipsometer
- Notice Date
- 8/6/2003
- Notice Type
- Solicitation Notice
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
- ZIP Code
- 20899-3571
- Solicitation Number
- Reference-Number-03-812-1270
- Response Due
- 8/15/2003
- Archive Date
- 8/30/2003
- Point of Contact
- Joan Smith, Contract Specialist, Phone (301)975-6458, Fax (301)975-8884, - Paul Cataldo, Contract Specialist, Phone (301) 975-6332, Fax (301) 975-8884,
- E-Mail Address
-
Joan.Smith@nist.gov, paul.cataldo@nist.gov
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. *** This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 01-15. *** The associated North American Industrial Classification System (NAICS) code for this procurement is 334519 with a small business size standard of 500 employees. *** The National Institute of Standards and Technology (NIST) has a requirement for a Variable Angle Spectroscopic Ellipsometer. All interested parties are invited to submit a quote for the following line items: LINE ITEM 0001: Variable Angle Spectroscopic Ellipsometer, in accordance with the following specifications: A) Core Optical System Performance * The instrument shall be capable of reflection mode ellipsometry with manually controlled angles of incidence at least from 45 to 90 deg (manually controlled). * Angle of incidence accuracy shall be 0.01 degree, or better. B) General Monochrometer-Optical Design and Performance * Data acquisition is required to be fast speed: at least 350 wavelengths in less than 1 second. * The instrument shall be capable of operating over at least the optical waveband from 370 nm to 900 nm (approx. 1.24 eV to 5.2 eV). * The instrument shall be of swept-wavelength (swept energy) design at the sample, both to allow improved accuracy and precision, and to minimize the optical flux impinging at any one time on possible photosensitive materials that may be part of future research. * Wavelength resolution of 2 nm is required. * Optics components are required to be a rotating compensator type. * In the straight-true setup where ellipsometric Del is equal to 0, the accuracy: Del = 0.0 +/- 0.5, Psi = Polarizer setting +/- 0.1. D) Sample size, stage and mapping requirements * The ellipsometer shall have flexibility with regard to sample size (small 1 cm^2 pieces to 150 mm wafers). * The instrument shall have suitable means for position control of placing the sample on the stage with reference to the measurement location. * The sample stage is required to be horizontal. * A sample stage that accommodates both X-Y and R-theta wafer mapping is required, and the control software shall allow entry of user specified sampling patterns in addition to patterns supplied by the contractor. E) Data Acquisition and Analytical Software * Software for instrument set-up, control, data acquisition, and data analysis shall be common language graphical user interface and shall be used in Windows 2000 OPS. * Software shall allow data files to be downloaded in common format such as ASCII text, or other standard database formats, for analysis on external NIST analysis software. * The analysis software shall permit simple, automatic analysis of common semiconductor films (silicon dioxide on silicon, polysilicon on silicon dioxide on silicon, silicon nitride on silicon, photoresist).* Users with minimal training and skill shall be able to utilize the data acquisition easily. * It must provide an easy way to set up measurement recipes. Such recipe shall automatically define the entire measurement configuration (including wafer map) for a specific material and shall automatically perform data analysis to provide film properties such as thickness and index of refraction for that specific recipe. * The wafer mapping control software shall allow entry of user specified sampling patterns in addition to patterns supplied by the contractor. F) System Computer and Electrical Power Protection * An IBM PC compatible with at least the following: Pentium - 4 processor, 100MHz bus speed, 256 Mbytes RAM, 20Mbyte Hard drive, 1.44 floppy, CD-RW, 17inch monitor, Operating system: minimum - Windows 2000. * System shall allow installation of NIST provided UPS, or else the contractor shall install UPS as part of instrument package. G) On-Site Set-up, On-Site Installation, On-Site Training and Documentation * The contractor shall set-up and install the ellipsometer system at NIST. * In addition, the contractor shall provide on-site training in the use of the instrument for data acquisition and in the use of analytic and modeling software provided. H) Warranty, Maintenance, Support Contracts, User-Replacement of Parts. * 1-year warranty parts and labor-for entire system is required. * Annual maintenance/repair program shall be available-details to be provided by the contractor. * Special tools, samples needed for calibration, system performance diagnosis shall be provided. Options - The following list of potential upgrade or expansion areas may make the instrument being quoted by the contractor more flexible and more valuable for possible future applications; the list is not necessarily exhaustive. If any of these are part of the base instrument capability, the contractor shall so state. In addition, the contractor is encouraged to describe any and all such capabilities that are available only as options and upgrades, and the additional cost if they were to be purchased at this time. LINE ITEM 0002 - OPTION -1 each, Wavelength range extensions-in either UV or IR.LINE ITEM 0003 - OPTION -1 each, Elevated/reduced stage temperature control.LINE ITEM 0004 - OPTION -1 each, Microspot attachment.LINE ITEM 0005 - OPTION -1 each, Automated angle adjustment. Please specify any other potential upgrade expansion capabilities for future applications. DELIVERY SHALL BE FOB DESTINATION. Delivery and installation is required within 365 days after receipt of order. *** The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. *** Award shall be made to the offeror whose quote offers the best value to the Government, technical, price, and other factors considered. The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement," 2) Past Performance, and 3) Price. Technical and Past Performance, when combined, are more important than price. *** Evaluation of Technical Capability shall be based on the information provided in the quotation. Offerors shall include the make and model of the product, manufacturer sales literature or other product literature that clearly documents that the offered product meets or exceeds the specifications stated above. Evaluation of Past Performance shall be based on the references provided in accordance with FAR 52.212-1(b)(10) and/or information provided by NIST and its affiliates. Offerors shall provide a list of at least THREE (3) REFERENCES to whom the same or similar products have been sold. The list of references shall include, at a minimum: The name of the reference contact person and the company or organization; the telephone number of the reference contact person; the contract or grant number; the amount of the contract and the address and the telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed. Past Performance shall be evaluated to determine the overall quality of the product and service provided by the Contractor. Offerors with no relevant past performance shall not be evaluated favorably or unfavorably. *** The following provisions and clauses apply to this acquisition: PROVISIONS: 52.204-6 Data Universal Numbering System (DUNS) Number; 52.212-1 Instructions to Offerors-Commercial Items. CLAUSES: 52.212-4 Contract Terms and Conditions-Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: (1) 52.203-6 Restrictions on Subcontractor Sales to the Government with Alternate I; (2) 52.210-4 Notice of Price Evaluation Preference for HUBZone Small Business Concerns; (3) 52.219-8 Utilization of Small Business Concerns; (4) 52.219-23 Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns Alternate I; (5) 52.222-19 Child Labor - Cooperation with Authorities and Remedies; (6) 52.222-21, Prohibition of Segregated Facilities; (7) 52.222-26, Equal Opportunity; (8) 52.222-35 Equal Opportunity for Special Disabled Veterans, Veterans, of the Vietnam Era, and Other Eligible Veterans; (9) 52.222-36, Affirmative Action for Workers with Disabilities; (10) 52.222-37 Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and other Eligible Veterans; (11) 52.225-3 - Buy American Act - North American Free Trade Agreement - Israeli Trade Act; (41 U.S.C. 10a-10d); (12) 52.225-13 Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129; (13) 52-225-15 Sanctioned European Union Country End Products; (14) 52.232 34, Payment by Electronic Funds Transfer - Other than Central Contractor Registration (31 USC 3332); and (8) Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. *** All interested parties should submit quotes to include the following: 1) Two copies of a quotation which addresses the line item; 2) Two copies of the technical description and/or product literature; 3) Description of commercial warranty; 4) Two (2) copies of the most recent published price list(s); and 5) A completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Items which may be downloaded at www.arnet.gov/far. *** All quotes should be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Joan Smith, Building 301, Room B129, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571. *** Submission must be received by 3:00 p.m. local time on August 15, 2003. FAX & E-MAIL QUOTES SHALL NOT BE ACCEPTED.
- Place of Performance
- Address: National Institute of Standards and Technology, Gaithersburg, Maryland
- Zip Code: 20899
- Country: United States
- Zip Code: 20899
- Record
- SN00393434-W 20030808/030806213402 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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