Loren Data's SAM Daily™

FBO DAILY ISSUE OF AUGUST 07, 2003 FBO #0616
SOLICITATION NOTICE

66 -- Xenon Difluoride Silicon Etch System

Notice Date

8/5/2003
 

Notice Type

Solicitation Notice
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

Reference-Number-03-812-0043
 

Response Due

8/14/2003
 

Archive Date

8/29/2003
 

Point of Contact

Joan Smith, Contract Specialist, Phone (301)975-6458, Fax (301)975-8884, - Paul Cataldo, Contract Specialist, Phone (301) 975-6332, Fax (301) 975-8884,
 

E-Mail Address

Joan.Smith@nist.gov, paul.cataldo@nist.gov
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. *** This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 01-15. *** The associated North American Industrial Classification System (NAICS) code for this procurement is 334413 with a small business size standard of 500 employees. All interested parties may submit a quote. *** The National Institute of Standards and Technology (NIST) has a requirement for a Xenon Difluoride Silicon Etch System. This requirement is based on providing state-of-the-art equipment for continuing semiconductor processing for NIST's Advanced Measurement Laboratory, Nanofabrication Facility. This equipment is required to upgrade an existing system currently owned and built by the researchers at NIST and housed in the Microfabrication Facility. This upgrade will provide improved safety features, improved process control, allow flexibility for wafer sizes up to 6", and introduce vendor equipment and application support. *** All interested parties are invited to submit a quote for the following line item: LINE ITEM 0001: Xenon Difluoride Silicon Etch System in accordance with the following specifications: The system shall provide pulsed delivery of xenon difluoride gas, using a single expansion chamber, to a reaction chamber capable of holding small pieces up to a 6" wafer. The computer control system shall provide the following capabilities: (a) a fifteen (15) inch 1280X1024 LCD touch screen and keyboard interface; (b) multi-user software interface with password protected access for each user; (c) password protected access to maintenance software (this allows for control over the process to prevent unauthorized access to hazardous applications); (c) adequate recipe storage; (d) process parameters logged for each etch; (e) set cycle time, number of cycles, XeF2 pressure from software user interface mix XeF2 with Nitrogren, set pressure for nitrogen from software user interface, and set pump down pressure for chamber and expansion chambers when etching with XeF2 from software user interface. Inspection: The system shall provide the ability to view the sample being etched both through a microscope and with a camera. It shall provide the following specific capabilities: (a) shall provide a 60X zoom binocular microscope with ring illuminator; (b) shall provide a transparent process chamber lid and shower head for visual inspection; and (c) a digital camera integrated with and controlled by the control software to periodically capture images either at a given time interval or at each pulse and integrate the images into a movie. Safety: The system shall provide the following features: (a) built-in, retractable fume hood with hardware interlock which automatically prevents opening process chamber when fume hood is retracted; (b) duplicate emergency power off (EPO) button for positioning with pump in chase; (c) pump turned off with EPO and power switch on unit; (d) key access required to turn unit back on after emergency power-off; (e) hardware interlock automatically shuts off all valves with loss of vacuum; (f) hardware interlock automatically closes XeF2 source when process chamber is near atmosphere; (g) exhausted gas box with inlet for purge gas; and (h) a source of XeF2 supplied by PelCham Inc. to ensure proper safety during handling. The system size requirement is for a bench-top type of unit to minimize use of expensive lab space not to exceed 24" wide x 20" deep x 25" high. The chamber shall be optimized to hold parts up to 6" wafers to minimize waste of xenon difluoride. The system shall provide a dry vacuum pump system proven to hold up to XeF2. *** DELIVERY SHALL BE FOB DESTINATION. Delivery and installation is required 16 weeks after receipt of order. *** The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. *** Award shall be made to the offeror whose quote offers the best value to the Government, technical, price, and other factors considered. The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement," 2) Past Performance, and 3) Price. Technical and Past Performance, when combined, are more important than price. *** Evaluation of Technical Capability shall be based on the information provided in the quotation. Offerors shall include the make and model of the product, manufacturer sales literature or other product literature that clearly documents that the offered product meets or exceeds the specifications stated above. Evaluation of Past Performance shall be based on the references provided in accordance with FAR 52.212-1(b)(10) and/or information provided by NIST and its affiliates. Offerors shall provide a list of at least THREE (3) REFERENCES to whom the same or similar products have been sold. The list of references shall include, at a minimum: The name of the reference contact person and the company or organization; the telephone number of the reference contact person; the contract or grant number; the amount of the contract and the address and the telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed. Past Performance shall be evaluated to determine the overall quality of the product and service provided by the Contractor. Offerors with no relevant past performance shall not be evaluated favorably or unfavorably. *** The following provisions and clauses apply to this acquisition: PROVISIONS: 52.204-6 Data Universal Numbering System (DUNS) Number; 52.212-1 Instructions to Offerors-Commercial Items. CLAUSES: 52.212-4 Contract Terms and Conditions-Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: (1) 52.203-6 Restrictions on Subcontractor Sales to the Government with Alternate I; (2) 52.210-4 Notice of Price Evaluation Preference for HUBZone Small Business Concerns; (3) 52.219-8 Utilization of Small Business Concerns; (4) 52.219-23 Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns Alternate I; (5) 52.222-19 Child Labor - Cooperation with Authorities and Remedies; (6) 52.222-21, Prohibition of Segregated Facilities; (7) 52.222-26, Equal Opportunity; (8) 52.222-35 Equal Opportunity for Special Disabled Veterans, Veterans, of the Vietnam Era, and Other Eligible Veterans; (9) 52.222-36, Affirmative Action for Workers with Disabilities; (10) 52.222-37 Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and other Eligible Veterans; (11) 52.225-3 - Buy American Act - North American Free Trade Agreement - Israeli Trade Act; (41 U.S.C. 10a-10d); (12) 52.225-13 Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129; (13) 52-225-15 Sanctioned European Union Country End Products; (14) 52.232 34, Payment by Electronic Funds Transfer - Other than Central Contractor Registration (31 USC 3332); and (8) Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. *** All interested parties should submit quotes to include the following: 1) Two copies of a quotation which addresses the line item; 2) Two copies of the technical description and/or product literature; 3) Description of commercial warranty; 4) Two (2) copies of the most recent published price list(s); and 5) A completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Items which may be downloaded at www.arnet.gov/far. *** All quotes should be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Joan Smith, Building 301, Room B129, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571. *** Submission must be received by 3:00 p.m. local time on August 14, 2003. FAX & E-MAIL QUOTES SHALL NOT BE ACCEPTED.
 

Web Link

Link to FedBizOpps document.
(http://www.eps.gov/spg/DOC/NIST/AcAsD/Reference-Number-03-812-0043/listing.html)
 

Place of Performance

Address: National Institute of Standards and Technology Gaithersburg, Maryland

Zip Code: 20899

Country: United States
 

Record

SN00393183-F 20030807/030805223306 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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