MODIFICATION
66 -- Low Pressure Chemical Vapor Deposition System
- Notice Date
- 5/16/2003
- Notice Type
- Modification
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-03-R-DL05
- Response Due
- 5/28/2003
- Archive Date
- 4/14/2004
- Point of Contact
- Dolorees Lockamy, Contract Specialist, Phone 202-767-3782, Fax 202-767-0430, - F. Janilea Bays, Contracting Officer, Phone 202-767-2974, Fax 202-767-0430,
- E-Mail Address
-
lockamy@contracts.nrl.navy.mil, bays@contracts.nrl.navy.mil
- Description
- This amendment is issued to answer questions from potential offerors, amend the specifications and amend the delivery schedule. 1. Answers to questions asked by potential offerors are as follows: Question 1. What wafer size is required? The specification states a need for 3", 4", 5" & 6" wafers but other sections ask for 4", 5" & 6" while the minimum requirement states 6". The wafer size requirement will dictate strongly what type system we quote. Answer 1. We require a furnace that will handle 3", 4", 5 & 6" wafers. Initially we will be using 3 & 4" wafers so we require wafer carriers for those sizes. At some point we may be using larger wafers in which case we will want larger carriers. Question 2. How many wafers are there per run? The specification asks for "boats" of 25 wafers for 4, 5, 6". Answer 2. The number of wafers per run will depend on the particular researchers needs. The system has to be flexible enough to handle 1- 2 wafers per run up to 25 wafers per run. Question 3. What will be the maximum process temperature the Oxide system will operate at? Answer 3. 1200 deg C., See section 4.2: Required tube specifications. Question 4. How do you intend to run the "combo Nitride-Poly" system? Can either a tube change or gas change option be used to process both films or is there a specific configuration requirement? Answer 4. A gas change option can be used. If a tube change is easily accomplished (<15 min to change) that option is acceptable. Question 5. We did not see any reference to a defectivity specification. Is this correct in that we do not have to provide a specification for defects? Answer 5. The specifications are amended. See paragraph 3. below. Question 6. What is the film thickness? Answer 6. This will vary depending on researchers needs. Typical thicknesses will be less than 0.5 microns. This is not an upper limit however. Question 7. What is the projected award date and delivery requirement? Answer 7. The projected award date should be 30 days after evaluations are completed. The delivery requirement is 75 days from date of award. Question 8. Section 4.1- Furnace Section. We would like to prefer type "S" spike and profile TC's. Answer 8. Type S is ok. Question 9. 208/240 V is a strange combination! Is it 208/110 V or 400/240 V? +N, +PE? 4 or 5 wire? Answer 9. We have available 208 Volt Single phase, 208 Volt 3 Phase and 120 Volt Single Phase. Question 10. Section4.82 - Wet Ox Steam Generator With Auto Refill, a) Is outside torch (Hydrox/Pyrogenic) acceptable? b) H2 is available? c) With Bubbler? Answer 10. No in all cases. Question 11. Section 4.91 - Nitride Poly 4 Loop Gas Tray Design a) Are digital MFC's with Device Net communication acceptable? Answer 11: Yes. Question 12. Section 8.2 - Spare Quartz Kit for Atmospheric and LPCVD Process Sizes are not CT standard. Are other sizes acceptable? Atm. (with twin rod) ID 238mm/OD 253mm; (front) 40/25mm (rear); Atm. (with CT paddle) ID 222mm/OD 235mm (front) 40/25mm (rear). Answer 12: Sizes that meet wafer sizes are acceptable. Question 13. LPCVD (with twin rod) ID 247mm/OD 253mm (front) 60mm (rear), LPCVD (with CT paddle) ID 215mm/OD 221mm (front) 60mm (rear). Answer 13: Sizes that meet wafer sizes are acceptable. Question 14. Section 8.4 Hoods for removal of cooling exhaust air. Is a water cooling system acceptable? Answer 14. Yes. Question 15. Delivery. Is a delivery time of 90-120 days acceptable? Answer 15: A delivery time of 90 days is acceptable. 2. The delivery schedule is changed to read 90 days from date of award. 3. The following is added to Section 3.0 of the Specifications: All offerors shall include in their proposal, the lowest defect density their system will meet.
- Place of Performance
- Address: NRL
- Record
- SN00326043-W 20030518/030516213810 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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