SOLICITATION NOTICE
66 -- Wafer Sputter System
- Notice Date
- 8/8/2002
- Notice Type
- Solicitation Notice
- Contracting Office
- US Army Robert Morris Acquisition Center, Adelphi Contracting Division, ATTN: AMSSB-ACA, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- DAAD17-02-R-0031
- Response Due
- 9/23/2002
- Point of Contact
- Tanya Hill, 301-394-1945
- E-Mail Address
-
Email your questions to US Army Robert Morris Acquisition Center, Adelphi Contracting Division
(thill@arl.army.mil)
- Small Business Set-Aside
- N/A
- Description
- NA The US Army Research Laboratory (ARL) intends to solicit on a competitive 'Brand Name or Equal' basis for the purchase of a Unaxis ClusterLine 200 basic wafer sputter system for 150mm Si-wafers to include Soft Etch Module, PVD process module for aluminum-n itride sputtering, RTA/RTP Process Module, additional sets (3) of shielding for metal sputtering of platinum, titanium, and tantalum, initial acceptance, training, documentation, installation, process set-up assistance and final acceptance testing in accor dance with the Statement of Work/Specifications to be included in the RFQ. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). The solicitation will be posted to the Army Single Face to Industry (ASFI) website at http ://www.fedbizopps.gov. Interested persons may identify their interest and capability to respond to the requirement or submit a proposal. No telephone requests will be honored. See numbered notes 22***
- Place of Performance
- Address: US Army Robert Morris Acquisition Center, Adelphi Contracting Division ATTN: AMSSB-ACA, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Country: US
- Zip Code: 20783-1197
- Record
- SN00136362-W 20020810/020808213700 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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