Loren Data's SAM Daily™

FBO DAILY ISSUE OF JULY 31, 2002 FBO #0241
MODIFICATION

66 -- High Resolution White Light Interferometric Microscope

Notice Date

7/29/2002
 

Notice Type

Modification
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

SB1341-02-Q-0553
 

Response Due

8/6/2002
 

Point of Contact

Carol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884, - Patrick Staines, Contract Specialist, Phone (301)975-6335, Fax (301)975-8884,
 

E-Mail Address

carol.wood@nist.gov, Patrick.Staines@nist.gov
 

Description

The above referenced solicitation is hereby modified to respond to technical questions and extend the due date for quotes. The due date for quotes is hereby changed FROM: Wednesday, July 31, 2002 at 3:00 PM EST, TO: Tuesday, August 6, 2002 at 3:00 PM EST. QUESTION: Clarification request on the following specifications for Item #1. Stated specification: "motorized stage XY stage - with computer & joystick controlled with 0.5 um or better XY positioning". Please clarify "0.5 um or better XY positioning". Is this resolution, repeatability, or positional accuracy? If it is positional accuracy, then please provide the range of travel vs. the accuracy required. ANSWER: Resolution. QUESTION: Stated specification: "Z resolution of 0.1 um or better". Is this specified resolution using a scanning or a phase shifting interferometric data collection technique? ANSWER: Stated specification should read "0.1 nm or better". The most sensitive technique (phase shift) is appropriate. QUESTION: What size in X-Y will the samples be? This information is needed for the largest wafer size. ANSWER: The largest sample would be 6" x 6". Therefore, a motorized stage of 6 inches total travel (+-3inches from a central origin) in both X and Y are specified (larger is acceptable).
 

Place of Performance

Address: NIST, Shipping & Receiving, 100 Bureau Drive, Gaithersburg, MD

Zip Code: 20899

Country: USA
 

Record

SN00127245-W 20020731/020729213229 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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